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Piezoresponse Measurement and Imaging of Electromechanical PZT and PZN-BT thin Films

Published online by Cambridge University Press:  21 March 2011

C. Morros ,
M.H. Corbett ,
G. Catalan ,
J.M. Gregg  and
R.M. Bowman
C. Morros
Affiliation:
Condensed Matter Physics & Materials Science Research Division, School of Mathematics & Physics, Queen's University of Belfast Belfast BT7 1NN, UK
M.H. Corbett
Affiliation:
Condensed Matter Physics & Materials Science Research Division, School of Mathematics & Physics, Queen's University of Belfast Belfast BT7 1NN, UK
G. Catalan
Affiliation:
Condensed Matter Physics & Materials Science Research Division, School of Mathematics & Physics, Queen's University of Belfast Belfast BT7 1NN, UK
J.M. Gregg
Affiliation:
Condensed Matter Physics & Materials Science Research Division, School of Mathematics & Physics, Queen's University of Belfast Belfast BT7 1NN, UK
R.M. Bowman
Affiliation:
Condensed Matter Physics & Materials Science Research Division, School of Mathematics & Physics, Queen's University of Belfast Belfast BT7 1NN, UK
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Abstract

Pulsed laser deposition (PLD) was used to growth thin films of lead zirconium titanate (PZT) and lead zinc niobate-barium titanate (PZN-BT). The PZT films were prepared from commercial PZT-5H ceramic target and the PZN-BT made from target made using a modified Columbite method. The PZT films had dielectric constants of 300 and loss of 0.03 at 10kHz, whilst for the PZN-BT films they were 350 and 0.03 respectively at 300K. Hysteresis measurements confirmed their switching properties

A piezoresponse microscope based on a modified atomic force microscope was developed to determine electromechanical response at a sub-micrometer resolution. The PZT films yielded d33 ∼100pm/V. Mapping measurements on the PZT demonstrated local switching of individual grains. First measurements of piezoresponse of PZN-BT yielded values in the region 150-200 pm/V.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC11.8.1
Copyright
Copyright © Materials Research Society 2001

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References

1. Papadakis, E.P. (ed.) Ultrasonic Instruments and Devices, Academic Press, (1999).Google Scholar
2. Ganpule, C.S., Stanishevsky, A., Aggarwal, S., Melngailis, J., Williams, E., Joshi, V. and Araujo, C. Paz de, Appl.Phys.Lett. 75, 3874–3876 (1999).10.1063/1.125485Google Scholar
3. Gruverman, A., Auciello, O., Ramesh, R. & Tokumoto, H., Nanotech. 8, A38–A43 (1997).10.1088/0957-4484/8/3A/008Google Scholar
4. Corbett, M., Catalan, G., Bowman, R.M. & Gregg, J.M., J. Mater. Res. 14, 2355–2358 (1999).10.1557/JMR.1999.0313Google Scholar
5. Catalan, G., Corbett, M., Bowman, R.M. & Gregg, J.M., Appl.Phys.Letts. 74, 3035–3037 (1999)10.1063/1.124056Google Scholar
6.6. Park, Seung-Eek & Shrout, Thomas R., J.Appl.Phys. 82 1804–1811 (1997).Google Scholar
7.7. Nagarajan, V., Alpay, S.P., Ganpule, C.S., Nagaraj, B.K., Aggarwal, S., Williams, E.D., Roytburd, A.L. & Ramesh, R., Appl. Phys. Letts. 77 438–440 (2000).10.1063/1.127002Google Scholar
8.8. Kighelman, Z., Damjanovic, D., Seifert, A., Sagalowicz, L. & Setter, N., Appl. Phys. Letts. 73 2281–2283 (1998).10.1063/1.121702Google Scholar