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Removal of Surface Carbon Impurities from Ultra-Low Loss Fluoride Glasses

Published online by Cambridge University Press:  25 February 2011

J. S. Sanghera ,
P. C. Pureza  and
I. D. Aggarwal
J. S. Sanghera
Affiliation:
Geo-Centers Inc., 10903 Indian Head. Highway, Ft. Washington, MD 20744
P. C. Pureza
Affiliation:
Naval Research Laboratory, 4555 Overlook Avenue, Washington, DC 20375
I. D. Aggarwal
Affiliation:
Naval Research Laboratory, 4555 Overlook Avenue, Washington, DC 20375
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Abstract

This paper describes a novel route for removal of surface carbon from heavy-metal fluoride glasses melted in vitreous carbon crucibles. The technique utilizes dry etching with active fluorine produced in a NF3 plasma generated in a microwave cavity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 268: Symposium K – Materials Modification by Energetic Atoms and Ions , 1992 , 63
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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