Hostname: page-component-cd9895bd7-8ctnn Total loading time: 0 Render date: 2024-12-29T06:08:06.804Z Has data issue: false hasContentIssue false
  • English
  • Français

The Role of Pore Characterization in the Challenge to Integrate Porous low-k Dielectrics

Published online by Cambridge University Press:  01 February 2011

David W. Gidley ,
Richard S. Vallery  and
Ming Liu
David W. Gidley
Affiliation:
gidley@umich.edu, University of Michigan, Physics, 450 Church St., Randall Laboratory, Ann Arbor, MI, 48109-1040, United States, 734-936-1134, 734-763-4934
Richard S. Vallery
Affiliation:
vallery@umich.edu, University of Michigan, Physics, Ann Arbor, MI, 48109-1040, United States
Ming Liu
Affiliation:
mingl@umich.edu, University of Michigan, Physics, Ann Arbor, MI, 48109-1040, United States
Get access

Abstract

Extended abstract to Symposium B

Keywords

porositydielectricporosimetry
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 990: Symposium B – Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics , 2007 , 0990-B02-06
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Gidley, D. W., Peng, H-G., and Vallery, R. S., Annual Review of Materials Research 36, 49 (2006).Google Scholar
2 Gidley, D. W., Peng, H-G., and Vallery, R. S., in Dielectric Films for Advanced Microelectronics, edited by Maex, K., Baklanov, M., and Green, M. (John Wiley and Sons, LTD, 2007), p. 85.Google Scholar
3 Juneja, J. S., Eyck, G. A. Ten, Bakhru, H., and Lu, T.-M., J. Vac. Sci. Technol. B 23, 2232 (2005).Google Scholar
4 Ro, H. W., Jones, R. L., Peng, H.-G., Hines, D. R., Lee, H.-J., Lin, E. K., Karim, A., Yoon, D. Y., Gidley, D. W., and Soles, C. L., to be published in Adv. Mater. (2007).Google Scholar