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Role of the Electrode Morphology, Thickness and Orientation in the Ferroelectric Performance of Epitaxial Pb(Zr,Ti)O3 Thin Films

Published online by Cambridge University Press:  21 March 2011

Cesar Guerrero ,
Florencio Sánchez ,
José Roldán ,
Frank Güell  and
María V. García-Cuenca
Cesar Guerrero
Affiliation:
Cesar Ferrater and Manuel Varela Universitat de Barcelona, Departament de Física Aplicada i Òptica, Av. Diagonal 647, E-08028 Barcelona, SPAIN
Florencio Sánchez
Affiliation:
Cesar Ferrater and Manuel Varela Universitat de Barcelona, Departament de Física Aplicada i Òptica, Av. Diagonal 647, E-08028 Barcelona, SPAIN
José Roldán
Affiliation:
Cesar Ferrater and Manuel Varela Universitat de Barcelona, Departament de Física Aplicada i Òptica, Av. Diagonal 647, E-08028 Barcelona, SPAIN
Frank Güell
Affiliation:
Universitat Rovira i Virgili, Lab. Física Aplicada i Cristal·lografia, E-43005 Tarragona, SPAIN
María V. García-Cuenca
Affiliation:
Cesar Ferrater and Manuel Varela Universitat de Barcelona, Departament de Física Aplicada i Òptica, Av. Diagonal 647, E-08028 Barcelona, SPAIN
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Abstract

A comparison of pulsed laser deposited PbZr0.53Ti0.47O3 (PZT) thin film capacitors with SrRuO3 (SRO) and LaNiO3 (LNO) electrodes on (001) yttria-stabilized zirconia (YSZ) and lattice matched (001) LaAlO3 substrates is presented. Both electrode materials allow for the formation of ferroelectric capacitors with large remnant polarization (20-30 μC/cm2) and negligible fatigue, although slight differences arise regarding the promotion of either the rhombohedral or tetragonal phases of PZT. Far more crucial seems to be the tendency of SrRuO3 to develop a rougher surface at either small (<30 nm) or large thickness (>100 nm), and on YSZ substrates. In those cases a highly defective and possibly low dielectric interface forms between the electrode and the ferroelectric layer, resulting in greatly degraded ferroelectric performance. LaNiO3 is free from these limitations except for the cracks forming at very large thickness (>300 nm), and therefore appears as a more versatile electrode material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC5.7.1
Copyright
Copyright © Materials Research Society 2001

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