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Sol-Gel Growth of High-Quality Pb(Zr,Ti)O3 Films on RUO2 Using Seed Layers

Published online by Cambridge University Press:  10 February 2011

G. J. Norga ,
Laura Fè ,
D. J. Wouters ,
A. Bartic  and
H.E. Maes
G. J. Norga
Affiliation:
IMEC vzw, Kapeldreef 75, Leuven, Belgium
Laura Fè
Affiliation:
IMEC vzw, Kapeldreef 75, Leuven, Belgium
D. J. Wouters
Affiliation:
IMEC vzw, Kapeldreef 75, Leuven, Belgium
A. Bartic
Affiliation:
IMEC vzw, Kapeldreef 75, Leuven, Belgium
H.E. Maes
Affiliation:
IMEC vzw, Kapeldreef 75, Leuven, Belgium
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Abstract

New approaches for improving fatigue performance of sol-gel PZT based ferroelectric capacitors with RuO2 electrodes are discussed. The use of thin (∼5 nm) high-Ti PZT seed layer was found to be effective for improving fatigue performance. For an optimized seedlayer thickness, FECAPs with excellent fatigue characteristics (less than 10% decrease in Pr after 1011 cycles) were obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 307
Copyright
Copyright © Materials Research Society 1999

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References

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