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Studies of c-Axis Threading Screw Dislocations in Hexagonal SiC

Published online by Cambridge University Press:  01 February 2011

Yi Chen ,
Xianrong Huang ,
Ning Zhang ,
Govindhan Dhanaraj ,
Edward Sanchez ,
Michael F. MacMillan  and
Michael Dudley
Yi Chen
Affiliation:
yichen1@ic.sunysb.edu, Stony Brook University, Materials Science and Engineering, 314 Old Engineering, Stony Brook University, Stony Brook, NY, 11794-2275, United States
Xianrong Huang
Affiliation:
xhuang@bnl.gov, Brookhaven National Laboratory, National Synchrotron Light Source II, Upton, NY, 11794-2275, United States
Ning Zhang
Affiliation:
nizhang@ic.sunysb.edu, Stony Brook University, Department of Materials Science and Engineering, Stony Brook, NY, 11794-2275, United States
Govindhan Dhanaraj
Affiliation:
gdhanaraj@notes.cc.sunysb.edu, Stony Brook University, Department of Materials Science and Engineering, Stony Brook, NY, 11794-2275, United States
Edward Sanchez
Affiliation:
edward.sanchez@dowcorning.com , Dow Corning Compound Semiconductor Solutions, Midland, MI, 48611, United States
Michael F. MacMillan
Affiliation:
mike.macmillan@dowcorning.com, Dow Corning Compound Semiconductor Solutions, Midland, MI, 48611, United States
Michael Dudley
Affiliation:
mdudley@notes.cc.sunysb.edu, Stony Brook University, Department of Materials Science and Engineering, Stony Brook, NY, 11794-2275, United States
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Abstract

In our study, closed-core threading screw dislocations and micropipes were studied using synchrotron x-ray topography of various geometries. The Burgers vector magnitude of TSDs can be quantitatively determined from their dimensions in back-reflection x-ray topography, based on ray-tracing simulation and this has been verified by the images of elementary TSDs. Dislocation senses of closed-core threading screw dislocations and micropipes can be revealed by grazing-incidence x-ray topography. The threading screw dislocations can be converted into Frank partial dislocations on the basal planes and this has been confirmed by transmission synchrotron x-ray topography.

Keywords

dislocationsdefectscrystal growth
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1069: Symposium D – Silicon Carbide 2008—Materials, Processing and Devices , 2008 , 1069-D02-03
Copyright
Copyright © Materials Research Society 2008

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References

REFERENCES

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