Hostname: page-component-cd9895bd7-dk4vv Total loading time: 0 Render date: 2024-12-29T11:30:58.882Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermotracttve Titanium-Nickel thin Films Formicroelectromechanical Systems and Active Composites

Published online by Cambridge University Press:  10 February 2011

D. S. Grummon  and
T. J. Pence
D. S. Grummon
Affiliation:
Department of Materials Science and Mechanics, Michigan State University, East Lansing, MI 48824
T. J. Pence
Affiliation:
Department of Materials Science and Mechanics, Michigan State University, East Lansing, MI 48824
Get access

Abstract

Thin films of thermoelastic titanium-nickel are of interest as a material basis for force-producing elements in microelectromechanical systems, and for active phases in mechanically-adaptive composite materials. The successful introduction of this material system into such application areas will depend on development of reliable thin film deposition protocols, together with the refinement of analytical models which successfully predict the response of active microstructures to a variety of dynamic thermal and mechanical stimuli. In the present paper we review some of our recent experimental and theoretical work which bear on these problems. With respect to thin film fabrication techniques we focus on problems of composition control and the manipulation of microstructure, with particular emphasis on opportunities afforded by amorphous precursor phases formed during low temperature processing, and the fine-grained, thermally stable crystalline microstructures obtainable using hot-substrate deposition. The films resulting from either approach retain the important thermomechanical response features of the well-known bulk-alloy system: shape memory and transformational superelasticity. The response can be modeled in terms of a continuum description augmented with internal variables that track fractional partitioning of the material between austenite and variants of the martensite.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 459: Symposium Y – Materials for Smart Systems II , 1996 , 331
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Wolf, R. H. and Heuer, A. H., “TiNi (Shape-Memory) Films on Silicon for MEMS Applications”, J. Microelec-tromenchanical Systems 4, 1057 (1995).Google Scholar
[2] Hou, Li and Grammon, D. S., “Transformational Superelasticity in Sputtered Titanium-Nickel Thin Films”, Scripta Metallurgica 33, 989–995 (1995).Google Scholar
[3] Miyazaki, S., Hashinaga, T., Yumikura, K., Horikawa, H., Ueki, T. and Ishida, A., Proc. 1995 Amer, N.. Conf. On Smart Structures and Materials, (1995).Google Scholar
[4] Grammon, D. S., Nam, S. and Chang, L., “Effect of Superelastically Deforming NiTi Surface Microalloys on Fatigue Crack Nucleation in Copper”, Proc. Mat. Res. Soc. 246, pp. 259–264 (1992).Google Scholar
[5] Grammon, D. S., Hou, Li and Pence, T. J., “Progress on Sputter-Deposited Thermotractive Titanium-Nickel Films”, J. de Physique IV, C8 pp 665–670 (1995).Google Scholar
[6] Hou, Li, pence, T. J. and Grammon, D. S., “Structure and Thermal Stability in Titanium-Nickel Thin Films Sputtered at Elevated Temperature on Organic and Polymeric Substrates”, Mat. Res. Soc. Proc. 360, pp 369–374 (1995).Google Scholar
[7] Lee, Jiun-Chung, Master's Thesis, Michigan State University, 1994.Google Scholar
[8] Kay, E., Adv. Electronics and Electron Physics, 17 p245 (1962).Google Scholar
[9] Chang, L. and Grammon, D. S., “Structure Evolution in Sputtered Thin Films of Titanium-Nickel, Part I - Diffusive Transformations”, Philosophical Magazine A, 1996, in press.Google Scholar
[10] Chang, L. and Grummon, D. S., “Structure Evolution in Sputtered Thin Films of Titanium-Nickel, Part-II - Dis-placive Transformations”, submitted to Philosophical Magazine A, 1996, in press.Google Scholar
[11] Chang, L., Ph. D. Thesis, Michigan State University, 1993.Google Scholar
[12] Li, Hou, Grummon, D. S. and Pence, T. J., “Transformational Superelasticity in Nanophase Sputtered Deposits of Equiatomic Titanium-Nickel”, 9th Annual University/Industry Symposium, MSU Center for Fundamental Materials Research, Apr. 10, 1995.Google Scholar
[13] Brinson, L.C. and Huang, M.S., J. Intell. Mater. Syst. and Struct. 7, 108–114 (1996).Google Scholar
[14] Pence, T.J., Grummon, D.S. and Ivshin, Y. in Mechanics of Phase. Transformations and Shape Memory Alloys, ed. Brinson, L.C. and Moran, B., (ASME AMD vol. 189, 1994), p. 45–58.Google Scholar
[15] Wu, X., Pence, T.J. and Grummon, D.S., this symposium.Google Scholar