Hostname: page-component-cd9895bd7-hc48f Total loading time: 0 Render date: 2024-12-28T19:49:16.174Z Has data issue: false hasContentIssue false
  • English
  • Français

Zeolite Low-k Film Properties Dependence on Nanocrystal Size

Published online by Cambridge University Press:  01 February 2011

Salvador Eslava-Fernandez ,
M.R. Baklanov ,
F. Iacopi ,
Brongersma S.H. ,
C.E.A. Kirschhock  and
K. Maex
Salvador Eslava-Fernandez
Affiliation:
eslava@imec.be, IMEC, ITTO, KAPELDREEF 75, LEUVEN, BELGIUM, B3001, Belgium, 003216288686
M.R. Baklanov
Affiliation:
baklanov@imec.be, IMEC, Kapeldreef 75, Leuven, B3001, Belgium
F. Iacopi
Affiliation:
iacopi@imec.be, IMEC, Kapeldreef 75, Leuven, B3001, Belgium
Brongersma S.H.
Affiliation:
Sywert.Brongersma@imec.be, IMEC, Kapeldreef 75, Leuven, N/A, B3001, Belgium
C.E.A. Kirschhock
Affiliation:
christine.kirschhock@biw.kuleuven.be, K.U.Leuven, COK, Leuven, N/A, B3001, Belgium
K. Maex
Affiliation:
Karen.Maex@imec.be, K.U.Leuven, ESAT, Leuven, N/A, B3001, Belgium
Get access

Abstract

Spin-on pure-silica-zeolite MFI films consist of zeolite nanocrystals embedded in a compacted silica matrix of zeolite primary nanoparticles. They appear to be promising as a low-k material due to their good mechanical properties and high microporosity, parallel to their intrinsic low k-value. Results are promising but the implementation of this material is still far away. To contribute to the implementation we present a study on the final film properties depending on the zeolite MFI nanocrystal size. Different techniques are used for the characterization: Dynamic Light Scattering, X-ray diffraction, Scanning Electron Microscopy, Nitrogen adsorption, EllipsoPorosimetry using toluene and NanoIndentation. The results show a clear dependence of the film properties on the nanocrystal size. Clearly, smaller nanocrystals provide better homogeneity, smaller pore size and higher mechanical properties. However, due to the hydrophilicity of the silica matrix lower k-values are only obtained for larger zeolite nanocrystals which provide with higher crystallinity in the films.

Keywords

zeolitedielectricdielectric properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 914: Symposium F – Materials, Technology and Reliability of Low-k Dielectrics and Copper Interconnects , 2006 , 0914-F03-08
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 , Wang et al., Adv. Mater. 13 (2001), 1463.Google Scholar
2 , Tosheva et al., Chem. Mater. 17 (2005), 2494.Google Scholar
3 http://www.iza-structure.org/databases/Google Scholar
4 , Wang et al., Langmuir 17 (2001), 2572–2574 Google Scholar
5 , Baklanov et al., J. Vac. Sci. Technol. B 18(3) (2000), 1385.Google Scholar
6 , Li et al., Adv. Funct. Mater. 14 (2004), 1019.Google Scholar
7 http://www.itrs.net/Common/2005ITRS/Interconnect2005.pdfGoogle Scholar