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D082 Residual Stresses in Thin TaNx/Ta Bilayers: Origin and Evolution

Published online by Cambridge University Press:  20 May 2016

K. J. Kozaczek
K. J. Kozaczek
Affiliation:
HyperNex, Inc., State College, PA
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 18 , Issue 2 , June 2003 , pp. 176
Copyright
Copyright © Cambridge University Press 2003

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