In recent years, many microrobots have been developed for search applications using swarms in places where humans cannot enter, such as disaster sites. Hexapod robots are suitable for moving over uneven terrain. In order to use micro-hexapod robots for swarm exploration, it is necessary to reduce the robot’s size while maintaining its rigidity. Herein, we propose a micro-hexapod with an SU-8 rigid frame that can be assembled from a single sheet. By applying the SU-8 coating as a structure to the hexapod and increasing the rigidity, the substrate size can be reduced to within 40 mm × 40 mm and the total length when assembled to approximately 30 mm. This enables the integration of the micro electromechanical systems (MEMS) process into small and inexpensive hexapod robots. In this study, we assembled the hexapod with a rigid frame from a sheet created using the MEMS process and evaluated the leg motion.

Electromagnetic actuation systems (EMA) have excelled themselves in microscale manipulation. Yet, the fastened structure of the current systems tethers the controlled workspace. In this paper, a new electromagnetic actuation principle is investigated. The actuator structure consists of a pair of coaxially movable electromagnets integrated to a robotic manipulator. The pair induces a coaxial homogeneous magnetic field or gradient to control the magnitude of the magnetic torque or force by changing the distance between the electromagnets asymmetrically. The robotic manipulator, on the other hand, transports the pair at five degrees of freedom to manipulate a microrobot in 3D space by closed-loop control with integrated vision feedback system. Numerical analyses are performed to investigate the induced electromagnetic field at the symmetrical/asymmetrical configuration of the coaxial pair. Accordingly, a correlation between the magnitude of the magnetic force and the asymmetric distance is obtained for flexible force control. A proof of concept prototype is constructed to validate the proposed actuation principle and evaluate its performance experimentally. The experimental results verify the numerical analysis and show the system applicability of inducing controlled forces on a micro-object in 2D and 3D workspaces at a velocity range of 65 to 157 $\mu$ m/s. Moreover, micromanipulation on a helical route is also demonstrated with an absolute error mean from the reference path of 191 $\mu$ m.

Microrobots with their promising applications are attracting a lot of attention currently. A microrobot with a triangular mechanism was previously proposed by scientists to overcome the motion limitations in a low-Reynolds number flow; however, the control of this swimmer for performing desired manoeuvres has not been studied yet. Here, we have proposed some strategies for controlling its position. Considering the constraints on arm lengths, we proposed an optimal controller based on quadratic programming. The simulation results demonstrate that the proposed optimal controller can steer the microrobot along the desired trajectory as well as minimize fluctuations of the actuators length.

In this study, we introduce a novel three-dimensional micro-scale robot capable of swimming in low Reynolds number. The proposed robot consists of three rotating disks linked via three perpendicular adjustable rods, actuated by three rotary and three linear motors, respectively. The robot mechanism has an important property which makes it superior to the previously designed micro swimmers. In fact, our goal is designing a micro swimmer which its controllability matrix has full rank and hence it will be capable to perform any desired maneuver in space. After introducing the mechanism and derivation of the dynamical equations of motion, we propose a control method to steer the robot to the desired position and orientation in the presence of external disturbances in the low Reynolds number flow. Simulation results confirm the successful performance of the proposed mechanism and employed control method demonstrating high maneuverability of microrobot.

We have introduced a new low-Reynolds-number microrobot with high 3D maneuverability. Our novel proposed microrobot has a higher rank of the controllability matrix with respect to the previous microswimmers which makes it capable of performing complex motions in space. In this study, governing equations of the microswimmer’s motion have been derived and simulated. Subsequently, we have proposed a cascade optimal control technique to control the swimmer trajectory. In the proposed control scheme, the actuation is provided in a way that an exponential stability on the system trajectory error as well as minimum fluctuations of control signals are achieved.

A new type of microrobot is described. Its simple and compact design is believed to be of promise in the microrobotics field. Stepping motion allows speeds up to 4mm/s. Resolution smaller than 10 nm is achievable. Experiments in an open-loop motion demonstrated a repeatability better than 50µm on a 10 mm displacement at an average speed of 0.25 mm/s. A position feedback based on a microvision system will be developed in order to achieve a submicron absolute position accuracy.

The work presented here concerns the design and manufacturing possibility of a polymodular autonomous microrobot moving like an earthworm. The study consists of the development of a new locomotion actuator based on shape memory alloys. This actuator is formed by a flexible frame forced in post-buckling by its assembly on a rigid skeleton cage. This mechanical structure, forming a knot in the microrobot chain, uses its two post-buckling equilibrium positions to achieve first the support and second the local lengthening enabling the movement of the microrobot. Initially, we present the technical solution designed for the locomotion actuator and the mechanical characterization of its malleable structure. Then, we present the instrumentation by educated SMA of a malleable structure and the capability of microrobot locomotion task in a vertical tube.