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mircoelectromechanical systems

European Journal of Applied Mathematics (1)

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1 results

Non-linear effects on canonical MEMS models
NICHOLAS D. BRUBAKER, JOHN A. PELESKO
Journal:

European Journal of Applied Mathematics / Volume 22 / Issue 5 / October 2011

Published online by Cambridge University Press:

06 May 2011, pp. 455-470
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In modelling electrostatically actuated micro- and nano-electromechanical systems, researchers have typically relied on a small-aspect ratio to form a leading-order theory. In doing so, small gradient terms are dropped. Although this approximation has been fruitful, its consequences have not been investigated. Here, this approximation is re-examined, and a new theory which includes often neglected small curvature terms is presented. Furthermore, the solution set of the new theory is explored for the unit disk domain and compared to the standard theory. Also, the analytical results are compared to experimental data.