The structure of Xe precipitates with sizes in several nanometers embedded in Al is known to be stable and its structure is well confirmed. But knowledge about the structure of Xe precipitates with nanometer sizes is very limited. There are difficulties in observing such small structures embedded in a crystalline matrix. An off-Bragg condition is used to observe diffraction patterns, dark-field, and high-resolution transmission electron microscopy images. The structure of Xe precipitates with sizes of about 2 nm and smaller is observed and confirmed. They are in an fcc structure and their orientation relationship with the Al matrix is similar to that of larger crystalline Xe precipitates or in an undefined structure. The lattice spacing or atomic distance in such nanometer-sized Xe precipitates is smaller than those of larger Xe precipitates embedded in Al matrix. There is a trend that as the size becomes smaller, the precipitates are more likely to have an undefined structure.