Experimental results from the first monochromated and
aberration-corrected scanning transmission electron microscope operated at
200 kV are described. The formation of an electron probe with a diameter
of less than 0.2 nm at an energy width significantly under 0.3 eV and its
planned application to the chemical analysis of nanometer-scale structures
in materials science are described. Both energy and spatial resolution
will benefit from this: The monochromator improves the energy resolution
for studies of energy loss near edge structures. The Cs corrector allows
formation of either a smaller probe for a given beam current or yields, at
fixed probe size, an enhanced beam current density using a larger
condenser aperture. We also point out another advantage of the combination
of both components: Increasing the convergence angle by using larger
condenser apertures in an aberration-corrected instrument will enlarge the
undesirable chromatic focus spread. This in turn influences spatial
resolution. The effect of polychromatic probe tails is proportional to the
product of convergence angle, chromatic aberration constant, and energy
spread. It can thus be compensated for in our new instrument by decreasing
the energy width by the same factor as the beam convergence is increased
to form a more intense probe. An alternative in future developments might
be hardware correction of the chromatic aberration, which could eliminate
the chromatic probe spread completely.