A new approach to simulation of stationary flows by Direct Simulation Monte Carlo method is proposed. The idea is to specify an individual time step for each component of a gas mixture. The approach consists of modifications mainly to collision phase simulation and recommendations on choosing time step ratios. It allows lowering the demands on the computational resources for cases of disparate collision diameters of molecules and/or disparate molecular masses. These are cases important e.g., in vacuum deposition technologies. Few tests of the new approach are made. Finally, the usage of new approach is demonstrated on a problem of silver nanocluster diffusion in argon carrier gas under conditions of silver deposition experiments.
