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1 results

  • NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams

  • Sybren Sijbrandij, Alexander Lombardi, Alain Sireuil, Fouzia Khanom, Brett Lewis, Christelle Guillermier, Doug Runt, John Notte
  • Journal:
    Microscopy Today / Volume 27 / Issue 3 / May 2019
    Published online by Cambridge University Press:
    03 May 2019, pp. 22-27
    Print publication:
    May 2019
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  • By combining a focused inert-gas ion beam instrument and a custom magnetic-sector mass spectrometer, high spatial resolution imaging and chemical analysis are provided within a single instrument. Sub-nanometer image resolution is achieved by secondary electron (SE) imaging, limited only by the probe-size of the primary beam, while the spatial resolution for chemical mapping obtained via secondary ion mass spectrometry (SIMS) is limited mainly by beam-sample interactions to about 10 nm. This article introduces the background behind this development, describes the instrument and its various operating modes, and presents examples of its applications.