Electron microprobe-based quantitative compositional measurement of first-row transition metals using their L$\alpha$ X-ray lines is hampered by, among other effects, self-absorption. This effect, which occurs when a broad X-ray line is located close to a broad absorption edge, is not accounted for by matrix corrections. To assess the error due to neglecting self-absorption, we calculate the L$\alpha$ X-ray intensity emitted from metallic Fe, Ni, Cu, and Zn targets, assuming a Lorentzian profile for the X-ray line and taking into account the energy dependence of the mass absorption coefficient near the absorption edge. We find that calculated X-ray intensities depart increasingly, for increasing electron beam energy, from those obtained assuming a narrow X-ray line and a single fixed absorption coefficient (conventional approach), with a maximum deviation of $\sim$15% for Ni and of $\sim$10% for Fe. In contrast, X-ray intensities calculated for metallic Zn and Cu do not differ significantly from those obtained using the conventional approach. The implications of these results for the analysis of transition-metal compounds by electron probe microanalysis as well as strategies to account for self-absorption effects are discussed.

Mass attenuation coefficients (MACs) of Th, U, Np, and Pu for oxygen X-rays have been experimentally determined using an electron microprobe. The MACs were obtained by measuring relative X-ray intensities emitted from ThO2, UO2, NpO2, and PuO2 targets, for incident electron energies from 5 to 30 keV, and processing them with the help of the computer program XMAC. The accuracy of the measured MACs is estimated to be better than 5%. Results are compared with MAC tabulations commonly used in electron probe microanalysis as well as with theoretical photoionization calculations. It is concluded that the MACs implemented in the Monte Carlo simulation program PENELOPE which are based on the photoionization cross-section calculations of Sabbatucci & Salvat [(2016). Theory and calculation of the atomic photoeffect. Rad Phys Chem121, 122–140], provide the best agreement with our measurements. The use of different MAC schemes for the analysis of mixed actinide oxide materials is discussed.