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1 results

  • Highly Automated Electron Energy-Loss Spectroscopy Elemental Quantification

  • Raman D. Narayan, J. K. Weiss, Peter Rez
  • Journal:
    Microscopy and Microanalysis / Volume 20 / Issue 3 / June 2014
    Published online by Cambridge University Press:
    10 April 2014, pp. 798-806
    Print publication:
    June 2014

  • A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.