As Si(Li) detector technology has matured, many of the fundamental
problems have been addressed in the competition among manufacturers and
there is now an expectation, implied by many textbooks, that all
energy-dispersive X-ray (EDX) detectors are made and will perform in the
same way. Although there has been some convergence in Si(Li) systems and
these are still the most common, manufacturing recipes still differ and
there are many alternative EDX devices, such as microcalorimeters and room
temperature detectors, that have both advantages and disadvantages over
Si(Li). Rather than emphasizing differences in technologies, performance
measures should reveal benefits relevant to the intended application. The
instrument is inevitably going to be a “black box” of
integrated components; this article reviews some of the methods that have
been applied and introduces some new techniques that can be used to assess
performance without resorting to complex software or sophisticated
mathematical algorithms. Sensitivity, resolution, artefacts, and stability
are discussed with particular application to compositional analysis using
electron beam excitation of X-rays in the 100-eV to 10-keV energy
region.