Results for the X-ray emission efficiency (counts per C per sr) of
K-lines for selected elements (C, Al, Si, Ti, Cu, Ge) and for the first
time also for compounds and alloys (SiC, GaP, AlCu, TiAlC) are
presented. An energy dispersive X-ray spectrometer (EDS) of known
detection efficiency (counts per photon) has been used to record the
spectra at a takeoff angle of 25° determined by the geometry of the
secondary electron microscope's specimen chamber. Overall
uncertainty in measurement could be reduced to 5 to 10% in dependence
on the line intensity and energy. Measured emission efficiencies have
been compared with calculated efficiencies based on models applied in
standardless analysis. The widespread XPP and PROZA models give
somewhat too low emission efficiencies. The best agreement between
measured and calculated efficiencies could be achieved by replacing in
the modular PROZA96 model the original expression for the ionization
cross section by the formula given by Casnati et al. (1982) A discrepancy remains for carbon, probably
due to the high overvoltage ratio.