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Growth behavior of evaporated porous thin films

Published online by Cambridge University Press:  31 January 2011

D. Vick ,
T. Smy  and
M. J. Brett
D. Vick*
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada T6G 2V4
T. Smy
Affiliation:
Department of Electronics, Carleton University, Ottawa, Ontario, Canada K1S 5B6
M. J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada T6G 2V4
*
a) Address all correspondence to this author. e-mail: vick@ee.ualberta.ca
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Abstract

Recent experimental work by a number of researchers has demonstrated that unusual high porosity thin films may be obtained in physical deposition systems by combining glancing angle deposition with in situ substrate motion control. The microstructure of these films consists of isolated columns engineered into shapes such as helices, posts, or chevrons. Due to the isolated nature of the columns, the films present a unique opportunity to study fundamental thin film growth behavior and, in particular, the influence of the self-shadowing mechanism in three dimensions. Apart from this academic motivation, there is the need to characterize the physical constraints imposed on the engineering of these films. In particular, this study will have implications for the realization of isolated, periodically arranged nanostructures envisioned for certain applications such as photonic band gap crystals. Results from an ongoing study of growth dynamics, morphology, porosity, and scaling behavior, and the dependence of these features on deposition parameters are presented.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 11 , November 2002 , pp. 2904 - 2911
Copyright
Copyright © Materials Research Society 2002

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