Hostname: page-component-cd9895bd7-fscjk Total loading time: 0 Render date: 2024-12-28T01:40:49.811Z Has data issue: false hasContentIssue false

Application of Focus Ion Beam Technique for TEM Multilayer Materials Examination

Published online by Cambridge University Press:  01 August 2010

J Wojewoda-Budka
Affiliation:
Polish Academy of Sciences, Poland
P Zieba
Affiliation:
Polish Academy of Sciences, Poland
J Morgiel
Affiliation:
Polish Academy of Sciences, Poland
N Sobczak
Affiliation:
Foundry Research Institute, Poland
R Nowak
Affiliation:
Foundry Research Institute, Poland

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2010