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High Density of Si Nanodots in Silicon Oxide Nanowires by Electron Beam Irradiation

Published online by Cambridge University Press:  01 August 2010

G-S Park ,
JH Lee ,
S Heo ,
H Kwon ,
J Park  and
SK Kim
G-S Park
Affiliation:
Samsung Advanced Institute of Technology, South Korea
JH Lee
Affiliation:
Samsung Advanced Institute of Technology, South Korea
S Heo
Affiliation:
Samsung Advanced Institute of Technology, South Korea
H Kwon
Affiliation:
Seoul National University, South Korea
J Park
Affiliation:
Seoul National University, South Korea
SK Kim
Affiliation:
Seoul National University, South Korea

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1736 - 1737
Copyright
Copyright © Microscopy Society of America 2010