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Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing

Published online by Cambridge University Press:  01 August 2010

MB Lowry ,
D Kiener ,
MM LeBlanc ,
C Chisholm ,
JN Florando ,
JW Morris Jr  and
AM Minor
MB Lowry
Affiliation:
University of California, Berkeley
D Kiener
Affiliation:
Lawrence Berkeley National Laboratory
MM LeBlanc
Affiliation:
Lawrence Livermore National Laboratory
C Chisholm
Affiliation:
University of California, Berkeley
JN Florando
Affiliation:
Lawrence Livermore National Laboratory
JW Morris Jr
Affiliation:
University of California, Berkeley
AM Minor
Affiliation:
University of California, Berkeley

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1748 - 1749
Copyright
Copyright © Microscopy Society of America 2010