Hostname: page-component-cd9895bd7-gxg78 Total loading time: 0 Render date: 2024-12-28T02:14:27.262Z Has data issue: false hasContentIssue false
  • English
  • Français

Problems with Measuring Beam Size of a Focused Ion Beam System by Means of the Rise-Distance

Published online by Cambridge University Press:  01 August 2010

L Roussel  and
J Orloff
L Roussel
Affiliation:
FEI Company, The Netherlands
J Orloff
Affiliation:
FEI Company

Extract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 192 - 193
Copyright
Copyright © Microscopy Society of America 2010