The CMP challenges for advanced technology nodes are discussed. Global and local uniformity challenges and their cumulative effects are presented. Uniformity improvements for advanced node integration were achieved through slurry, pad and platen optimization, innovative integration schemes, the reduction of incoming variation and the reduction of cumulative effects. We discuss reduction of typical CMP defect types. Defects resulting from simple mechanisms (foreign material, polish residues) and those resulting from chemical and physical interactions (corrosion, chemical attack, scratches, physical migration) and strategies for control are studied. Defectivity reduction measures include new post-CMP clean chemicals, new slurries and pads and reduction of incoming defectivity. Finally we discuss an observed tradeoff between good defectivity and good uniformity.

Nano-thin films of Lu2O3 with 80nm thickness have been deposited on metal-coated glass substrate in metal-insulator-metal (MIM) geometry by electron-beam evaporation technique. High field and temperature dependent electrical characterization on grown MIM structures have been investigated in symmetric electrode configuration using Al, Cr or Cu metals. The temperature dependent I-T characteristic features have been found to support the conduction mechanism across MIM systems to be an electrode-limited process except for Al-Lu2O3-Al device, which show Poole-Frenkel mechanism in high electric field region. The associated parameters such as activation energy (∆E), coefficient of barrier lowering (β) and effective height of Schottky barrier at zero biasing (Фo) have been evaluated at different values of temperature and electric field to further investigate the dominent conduction mechanism.

Light collection efficiency and specific molecular detection are crucial factors for the performance of bio-chemical molecule sensors. In this paper, the low optical-reflection silicon (Si) substrates which combine reduced optical reflectivity by light trapping effect and high Raman enhancement ability of gold nanoparticles (Au-NPs) coated textured Si substrates are investigated for surface-enhanced Raman scattering (SERS). A fast, single-step and highly controllable nanosecond (ns) laser processing technique is employed to fabricate textured Si substrates under ambient conditions. Parallel arrays of micro-pyramids are fabricated on Si surface by direct laser writing two-dimensional structures. SEM micrographs clearly show well-ordered surface features in the form of micro-pyramid shape with well-defined sharp tips on the laser processed Si substrates. The aggregation of Si micro/nanoparticles on Si surface forms nanocavities and nanogaps and further enhances the surface roughness in order to minimize the optical reflection. The low optical reflection Si substrates exhibit optical reflection below 15% over a broad wavelength range from 300 nm to 1200 nm. The textured Si substrates with high signal reproducibility are successfully applied as SERS substrates to detect a very small concentration of Rhodamine B molecules with an average enhancement factor of the order of ∼107. The low optical reflection and SERS signal amplification are also altered by the variation of laser pulse energy resulting into low optical reflection and high SERS signal intensity over the entire laser-patterned area. The effect of surface roughness on water contact angle was studied after the modification with Polydimethylsiloxane (PDMS), the surfaces show perfect superhydrophobicity with almost no water adhesion. This approach provides a novel high-speed and cost-effective method for fabricating SERS substrate with micro/nano-scale surfaces roughness and low optical reflection for high Raman signal enhancement.

Palladium germanide thin films were investigated for infrared plasmonic applications. Palladium thin films were deposited onto amorphous germanium thin films and subsequently annealed at a range of temperatures. X-ray diffraction was used to identify stoichiometry, and Scanning Electron Micrographs, along with Energy Dispersive Spectroscopy (EDS) was used to characterize composition and film quality. Resistivity was also measured for analysis. Complex permittivity spectra were measured from 0.3 to 15 µm using IR ellipsometry. From this, surface plasmon polariton (SPP) characteristics such as propagation length and mode confinement were calculated and used to determine appropriate spectral windows for plasmonic applications with respect to film characteristics. Films were evaluated for use with on-chip plasmonic components.

Local environment of fluorescent dyes could strongly affects emission dynamics of the latter. In particular, both signal intensities and emission lifetimes are highly sensitive to solvent temperatures. Here, temperature-dependent behavior Rhodamine B fluorescence in water and ethanol solutions was experimentally investigated. Phase transition point between liquid water and ice was shown to have a dramatic impact on both in intensity (30-fold drop) and in lifetime (from 2.68 ns down to 0.13 ns) of the dye luminescence along with the shift of spectral maxima from 590 to 625 nm. At the same time, use of ethanol as solvent does not lead to any similar behavior. The reported results and approaches enable further investigations of dye-solvent interactions and studies of physical properties at phase transition points.

We demonstrate theoretically the possibility for the Bose-Einstein condensation of excitons in properly selected double walled carbon nanotube structures. The condensation mechanism is enabled by the interaction of excitons residing on one tubule with the near-field generated by the plasmon mode of the other coaxial tubule, resulting in new hybridized bosonic quasiparticles called exciton-plasmons. We derive the dispersion relation for the exciton-plasmons, and calculate the exciton participation rate in the exciton-plasmon condensate. The requirements for forming the appropriate double walled carbon nanotube combinations capable of the optimum exciton-plasmon coupling regime needed to realize the condensation effect, as well as the possibility of experimental observation of the phenomenon, are discussed.