The Monte Carlo software CASINO has been expanded with new modules for the simulation of complex beam scanning patterns, for the simulation of cathodoluminescence (CL), and for the calculation of electron energy deposition in subregions of a three-dimensional (3D) volume. Two examples are presented of the application of these new capabilities of CASINO. First, the CL emission near threading dislocations in gallium nitride (GaN) was modeled. The CL emission simulation of threading dislocations in GaN demonstrated that a better signal-to-noise ratio was obtained with lower incident electron energy than with higher energy. Second, the capability to simulate the distribution of the deposited energy in 3D was used to determine exposure parameters for polymethylmethacrylate resist using electron-beam lithography (EBL). The energy deposition dose in the resist was compared for two different multibeam EBL schemes by changing the incident electron energy.

Kα radiation from low charge chlorine is examined for cold dense plasma diagnostics. A relativistic atomic structure calculation shows that the transition energies of Kα lines are slightly shifted to a higher-energy side according to the degree of M-shell ionization. Total spectral shift from Cl+ Kα lines up to those with a fully stripped M-shell is about 10 eV. With an assumption that collisional-radiative-equilibrium is valid, spectral calculations were carried out for a C2H3Cl-plasma heated by an ion beam, and clear deformation among spectral line-shapes is found in the range of the electron temperatures of ≤~ 30 eV. Contribution to the composite spectra of Kα lines with an excited electron in the outer-shell is also briefly discussed. Cl-Kα lines with M-shell electrons can be expected to give us distinct understandings for energy deposition by an ion beam in cold dense plasma.

Energy deposition by high-intensity pulsed ion beam into a metal target has been studied with time-of-flight (TOF) of ions which can be related to the original ion kinetic energy E0 and the ion mass with . It is found that the TOF effect has a profound influence on the kinetic energy distribution of implanted ions and subsequent energy deposition process into the target. The HIPIB of mixed H+ and C+ was extracted from a magnetically insulated ion diode at a peak accelerating voltage of 350 kV, leading to an ion current density of 300 A/cm2 at the target. The widespread ion energy spectrum remarkably varied in shape as arriving at the target surface, from the original Gaussian-like of 80-ns duration to a pulse form of a sharp front and a long tail extending to about 140-ns duration. Energy loss of the mixed ions into a Ti target was simulated utilizing a Monte Carlo method. The energy deposition generally showed a shallowing trend and could be divided into two phases proceeded with sequent arrivals of H+ and C+. Note that, the peak value of deposited energy profile appeared at the beginning of mixed ion irradiation phase, other than the phase of firstly arrived H+ with peak kinetic energy and peak ion current. This study indicated that TOF effect of ions greatly affects the HIPIB-matter interaction with a kinetic energy spectrum of impinging ions at the target, noticeably differing from that of original output of the ion source; consequently, the specific energy deposition phenomena of the widespread ion energy can be studied with the TOF correlation of ion energy and ion current, otherwise not obtainable in common cases assuming fixed ion energy distribution in accordance with the original source output.

In this paper, potential of diagnostics with the use of Kα radiation for an energy deposition process from an intense ion-beam to background plasma is considered quantitatively. Kα radiation is a good candidate for the purpose. The wavelength of Kα radiation is varied according to the charge state of an emitter atom, and the diagnostics spatially resolved with radiations from various kinds of charge states can give us a profile of plasma temperature in a target material. For the calculation of Kα yield, an atomic population kinetics code is developed, and the result shows that Kα radiation has potential to get information of a plasma profile heated by an intense ion-beam.