Recent topics in the development of micromagneticactuators in Japan are reviewed. Electromagneticmicroactuators less than 1 mm in diameter, e.g.micromotor, and microvalves have been fabricated andtheir high performance has been demonstrated. A newtype microactuator based upon magnetostriction has alsobeen developed and has shown a large cantileverdeflection. In addition, some models of the microrobotsusing micromagnetic actuators were able to move using awireless remote power supply.

Special micromanipulators are needed to manipulate very small objects. Most micromanipulators are specialized to perform a task they are designed for, but are too inflexible to adapt to other problems. Therefore, flexible newly developed mobile microrobots are presented with precision in the sub-micrometer range while offering a macroscopic workspace. The main parts of each mobile microrobot, the mobile platform, the manipulator and end effectors, are explained in detail, with some experimental data given.

The new driving principle of the mobile platform allows high resolution, low energy consumption, which makes an on-board power supply feasible and a maximum velocity of several mm/s.

Useful human interfaces are needed for a successful teleoperation. The most important interface next to the vision feedback is a haptic interface. The paper presents a newly developed haptic interface for a micromanipulation station. The mechanical design and the design of the control system of the haptic interface are discussed in details. The control architecture of the micromanipulation station and the integration of the haptic device into the micromanipulation station are presented.