Hostname: page-component-78c5997874-mlc7c Total loading time: 0 Render date: 2024-11-10T14:01:38.198Z Has data issue: false hasContentIssue false

Micromagnetic actuators

Published online by Cambridge University Press:  09 March 2009

K.I. Arai
Affiliation:
Aral Laboratory, Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba–ku Sendai 980–77 (Japan). Phone: +81 –22 –217–5487. Fax.: +8 –22 –217–5490
T. Honda
Affiliation:
Aral Laboratory, Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba–ku Sendai 980–77 (Japan). Phone: +81 –22 –217–5487. Fax.: +8 –22 –217–5490

Summary

Recent topics in the development of micromagneticactuators in Japan are reviewed. Electromagneticmicroactuators less than 1 mm in diameter, e.g.micromotor, and microvalves have been fabricated andtheir high performance has been demonstrated. A newtype microactuator based upon magnetostriction has alsobeen developed and has shown a large cantileverdeflection. In addition, some models of the microrobotsusing micromagnetic actuators were able to move using awireless remote power supply.

Type
Article
Copyright
Copyright © Cambridge University Press 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Ahn, C.H., Kim, Y.J. and Allen, M.G., “A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coilsProc. IEEE MEMS'93 Workshop (1993) p. 1 et seq.Google Scholar
2. H., Guckel, Christensen, T.R., Skrobis, K.J., Jung, T.S., Klein, J., Hartojo, K.V. and Widjaja, I., “A first functional current excited planar rotational magnetic micromotorProc. IEEE MEMS'93 Workshop (1993) p. 7 et seq.Google Scholar
3. Itoh, T., “Ultra-small electromagnetic motors and micro-generators, and their application to micromachinesJ. Magn. Soc. of Japan, 18, 922 (1994) (in Japanese).Google Scholar
4. Yanagisawa, K., Kuwano, H. and Tago, A., “An electromagnetically driven microvalve7th Int. Conf. on Solid-State Sensors and Actuators, Transducers '93 (1993) p. 102 et seq.Google Scholar
5. Hosaka, H., Kuwano, H. and Yanagisawa, K., “Electromagnetic microrelays: concepts and fundamental characteristicsProc. IEEE MEMS'93 (1993) p. 12 et seq.Google Scholar
6. A. E., Clark, Ferromagnetic Materials, Vol. 1, (ed. by Wohlfarth, E.P.), (North-Holland, Amsterdam, (1980).Google Scholar
7. Hayashi, Y., Honda, T., Arai, K.I., Ishiyama, K. and Yamaguchi, M., “Dependence of magnetostriction of sputteredTb-Fe Films on preparation conditionsIEEE Trans.Magn. 29, 3129 (1993).CrossRefGoogle Scholar
8. Honda, T., Hayashi, Y., Arai, K.I., Ishiyama, K. and Yamaguchi, M., “Magnetostriction of sputtered Sm-Fe thin filmsIEEE Trans. Magn. 29, 3126 (1993).CrossRefGoogle Scholar
9. Honda, T., Arai, K. I. and Yamaguchi, M., “Fabrication of magnetostrictive actuators using rare-earth (Tb, Sm)-Fe thin filmsJ. Appl. Phys. 76, 6994 (1994).CrossRefGoogle Scholar
10. Akamine, S., Albrecht, T.R., Zdeblick, M.J. and Quate, C.F., “A planar process for microfabrication of a scanning tunneling microscopeSensors and Actuators A21–A23, 964 (1990).Google Scholar
11. Riethmiüller, and Benecke, W., “Thermally excited silicon microactuatorsIEEE Trans. Electron Devices 35, 758 (1988).CrossRefGoogle Scholar
12. Riethmilller, and Uchino, K.Micro walking machines using piezoelectric actuatorsJ. Rob. Mech. 1, 124 (1989).Google Scholar
13.Riethmilller, and Yasuda, T., Shimoyama, I. and Miura, H., “Microrobot actuated by a vibration energy field7th Int. Conf on Solid-State Sensors and Actuators, Transducers '93 (1993) p. 42 et seq.Google Scholar
14.Riethmilller, and Fukuda, T., Hosokai, H., Ohyama, H., Hashimoto, H. and Arai, F., “Giant magnetostrictive alloy (GMA) applications to micro mobile robot as a micro actuator without power supply cablesProc. IEEE MEMS'91 Workshop (1991) p. 210 et seq.Google Scholar