Search

Activation energies for the intermixing reaction of textured metal-metal multilayer thin films have been determined using X-ray diffraction analysis. Kinetic data were collected utilizing an area detector so as to reduce intensity bias from changes in out-of-plane texture during the intermixing reaction. Activation energies for Al/Pt, Ni/Ti, and Co/Al metal-metal multilayer thin films have been determined as 95.4(2) kJ/mol, 201(13) kJ/mol, and 247(19) kJ/mol, respectively.

A sample preparation method has been developed whereby sharp needle-shaped specimens for atom probe analysis are fabricated from multilayer thin films deposited onto silicon substrates. The specimens are fabricated in an orientation such that atom probe composition profiles across the layer interfaces can be determined with atomic-layer spatial resolution, i.e., the layer normals are parallel to the needle axis. The method uses standard silicon etching techniques and focused ion-beam milling. The feasibility and utility of this technique are shown through its application to a NiFe/CoFe/Cu/CoFe-based thin film structure.

Search Results

Refine search

Refine search

Actions for selected content:

2 results

Determination of activation energy of intermixing in textured metal-metal multilayer films via two-dimensional X-ray diffraction

Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures

Search Results

Refine search

Refine search

Actions for selected content:

Save Search

2 results

Determination of activation energy of intermixing in textured metal-metal multilayer films via two-dimensional X-ray diffraction

Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures