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Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques
Ichiro Takeuchi, Robert Bruce van Dover, Hideomi Koinuma
Journal:

MRS Bulletin / Volume 27 / Issue 4 / April 2002

Published online by Cambridge University Press:

31 January 2011, pp. 301-308

Print publication:

April 2002
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Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques.

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Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques