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Accepted manuscript

Fabrication of Ultra-Low Absorption Thin Films via Ion Beam Assisted Electron Beam Evaporation

Published online by Cambridge University Press:  21 March 2025

Ruichen Song Open the ORCID record for Ruichen Song [Opens in a new window] ,
Jiaqi Hu ,
Yunqi Peng ,
Yingao Xiao ,
Yuxiang Wang ,
Kongxu Zhu ,
Yuheng Jiang ,
Xusheng Xia Open the ORCID record for Xusheng Xia [Opens in a new window]  and
Zhilin Xia
Ruichen Song
Affiliation:
Wuhan University of Technology, State key laboratory of advanced glass materials, Wuhan, China Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Jiaqi Hu
Affiliation:
Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Yunqi Peng
Affiliation:
Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Yingao Xiao
Affiliation:
Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Yuxiang Wang
Affiliation:
Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Kongxu Zhu
Affiliation:
Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Yuheng Jiang
Affiliation:
Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Xusheng Xia*
Affiliation:
Wuhan University of Technology, State key laboratory of advanced glass materials, Wuhan, China Wuhan University of Technology, Material Science and Engineering, Wuhan, China
Zhilin Xia*
Affiliation:
Wuhan University of Technology, State key laboratory of advanced glass materials, Wuhan, China Wuhan University of Technology, Material Science and Engineering, Wuhan, China
*
Correspondence to: Xusheng Xia. Wuhan University of Technology, Material Science and Engineering, Wuhan, China. Email: xsxia@whut.edu.cn. Zhilin Xia. Wuhan University of Technology, Material Science and Engineering, Wuhan, China. Email: xiazhilin@whut.edu.cn.
Correspondence to: Xusheng Xia. Wuhan University of Technology, Material Science and Engineering, Wuhan, China. Email: xsxia@whut.edu.cn. Zhilin Xia. Wuhan University of Technology, Material Science and Engineering, Wuhan, China. Email: xiazhilin@whut.edu.cn.
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Abstract

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Keywords

thin filmsTi doped Ta2O5electronic structureannealing treatment
Type
Research Article
Information
High Power Laser Science and Engineering , Accepted manuscript , pp. 1 - 37
Creative Commons
Creative Common License - CCCreative Common License - BY
This is an Open Access article, distributed under the terms of the Creative Commons Attribution licence (https://creativecommons.org/licenses/by/4.0/), which permits unrestricted re-use, distribution, and reproduction in any medium, provided the original work is properly cited.
Copyright
© The Author(s), 2025. Published by Cambridge University Press in association with Chinese Laser Press