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8 - Science and Technology of Integrated Nitride Piezoelectric/Ultrananocrystalline Diamond (UNCD™) Films for a New Generation of Biomedical MEMS Energy Generation, Drug Delivery, and Sensor Devices

Published online by Cambridge University Press:  08 July 2022

By
Martin Zalazar  and
Orlando Auciello
Edited by
Orlando Auciello
Orlando Auciello
Affiliation:
University of Texas, Dallas
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Summary

This chapter focus on describing the science and technology related to the use of UNCD films for fabricating microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) structures suitable for use in various devices for medical applications. Topics discussed include: 1) Design and fabrication of UNCD-based micro-turbines for chemical lab on a chip, 2) description of the materials science involved in the integration of UNCD films with dissimilar materials in film form, such as piezoelectric nitrides for development of piezo-actuated UNCD-based MEMS/NEMS, and integration with metal films for contacts, and biological matter (e.g., heart cells) for cell bit-induced mechanical deformation of piezo/UNCD cantilevers to generate power via the converse piezoelectric effect, whereby mechanical deformationof cantilevers is transduced into power generation, via mechanical displacement in opposite directions of + and - ions in the piezoelectric layer, thus voltage generation between two electrode layers sandwiching the piezoelectric layer for a new generation of biomedicalenergy generation devices and biosensors.

Keywords

piezoelectricaluminum nitridefilmsUNCD filmsintegratedMEMS/NEMSbiosensordrug deliveryenergy generationsystems
Type
Chapter
Information
Ultrananocrystalline Diamond Coatings for Next-Generation High-Tech and Medical Devices , pp. 214 - 236
Publisher: Cambridge University Press
Print publication year: 2022

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References

Srinivasan, V., Pamula, V. K., and Fair, R. B., “An integrated digital microfluidic lab-on-a-chip for clinical diagnostics on human physiological fluids,” Lab Chip, vol. 4 (4), p. 310, 2004.CrossRefGoogle ScholarPubMed
Grate, J. W., Martin, S. J., and White, R. M., “Acoustic wave microsensors: Part II,” Anal. Chem., vol. 65 (22), p. 987, 1993.Google Scholar
Zalazar, M., Mass Microsensors for Implantable MEMS. Atlanta, GA: Scholars Press, 2014.Google Scholar
Zalazar, M., “Design, simulation, fabrication and characterization of mass microsensors embeddable to an implantable microvalve for glaucoma treatment,” Thesis, Universidad Nacional del Litoral, Facultad de Ingeniería y Ciencias Hídricas, Instituto de Desarrollo Tecnológico para la Industria Química, Santa Fe, Argentina, 2013.Google Scholar
Zalazar, M. and Guarnieri, F., “Quartz crystal microbalance: design and simulation,” Mecánica Computacional, vol. 28, p. 2123, 2009.Google Scholar
Zalazar, M. and Guarnieri, F., “Analysis and evaluation of piezoelectric sensors behaviour,” Mecánica Computacional, vol. 29, p. 6665, 2010.Google Scholar
Rolfe, B., Mooney, J., Zhang, B., et al., “The fibrotic response to implanted biomaterials: implications for tissue engineering,” in Regenerative Medicine and Tissue Engineering: Cells and Biomaterials, Eberli, D., Ed. London: IntechOpen, 2011.Google Scholar
Chung, K. H., Liub, G. T., Duhb, J. G., and Wang, J. H., “Biocompatibility of a titanium–aluminum nitride coating on a dental alloy,” Surf. Coat. Technol., vol. 188, p. 745, 2004.Google Scholar
Chen, C. C., Lin, C. T., Lee, S. Y., et al., “Biosensing of biophysical characterization by metal-aluminum nitride-metal capacitor,” Appl. Surf. Sci., vol. 253, p. 5173, 2007.Google Scholar
Chou, C. H., Lin, Y. C., Huang, J. H., Tai, N. H., and Lin, I.-N., “Growth of high quality AlN thin films on diamond using TiN/Ti buffer layer,” Diam. Relat. Mater., vol. 15, p. 404, 2006.CrossRefGoogle Scholar
Dubois, M. and Muralt, P., “Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications,”Appl. Phys. Lett., vol. 74, p. 3032, 1999.Google Scholar
Auciello, O. and Sumant, A. V., “Status review of the science and technology of ultrananocrystalline diamond (UNCDTM) films and application to multifunctional devices,” Diam. Relat. Mater., vol. 19, p. 699, 2010.Google Scholar
Auciello, O. and Shi, B., “Science and technology of bio-inert thin films as hermetic-encapsulating coatings for implantable biomedical devices: application to implantable microchip in the eye for the artificial retina,” in Implantable Neural Prostheses 2: Techniques and Engineering Approaches, Zhou, D. D. and Greenbaum, E., Eds. New York: Springer, p. 63, 2016.Google Scholar
Bajaj, P., Akin, D., Gupta, A., et al., “Ultrananocrystalline diamond film as an optimal cell interface for biomedical applications,” Biomed. Microdevices, vol. 9, p. 787, 2007.Google Scholar
Auciello, O., Birrell, J., Carlisle, J. A., et al., “Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films,” J. Phys. Condens. Matter, vol. 16, p. 539, 2004.Google Scholar
Xiao, X., Wang, X., Liu, J., et al., “In Vitro and in vivo evaluation of ultrananocrystalline diamond for coating of implantable retinal microchips,” J. Biomed. Mater. Res. B Appl. Biomater., vol. 77B, p. 273, 2006.CrossRefGoogle Scholar
Zhou, D. D. and Greenbaum, E. (Eds.), Implantable Neural Prostheses: Techniques and Engineering Approaches. New York: Springer, 2010.Google Scholar
Auciello, O., Gurman, P., Berra, A., Saravia, M. J., and Zysler, R., “Ultrananocrystalline diamond (UNCD) films for ophthalmological applications,” in Diamond- Based Materials for Biomedical Applications, Narayan, R., Ed. Cambridge: Woodhead Publishing, p. 151, 2013.Google Scholar
Zalazar, M., Gurman, P., Park, P., et al., “Integration of piezoelectric aluminum nitride and ultranano-crystalline diamond films for implantable biomedical microelectromechanical devices,” Appl. Phys. Lett., vol. 102, p. 104101, 2013.Google Scholar
Assouar, M. B.,Elmazria, O., Kirsch, P., and Alnot, P., “High frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography,” J. Appl. Phys., vol. 101, p. 114507, 2007.Google Scholar
Ishihara, M., Nakamura, T., Kokai, F., and Koga, Y., “Preparation of AlN and LiNbO3 thin films on diamond substrates by sputtering method,” Diam. Relat. Mater., vol. 11, p. 408, 2002.CrossRefGoogle Scholar
Gruverman, A., Auciello, O., and Tokumoto, H., “Imaging and control of domain structures in ferroelectric thin films via scanning force microscopy,” in Ann. Rev. Mater. Sci., vol. 28, p. 101, 1998.CrossRefGoogle Scholar
Auciello, O., Gruverman, A., Tokumoto, H., et al.“Studies of polarization phenomena in ferroelectric thin films via direct nanoscale scanning force imaging microscopy,” MRS Bull., vol. 23, (1), p. 37, 1998.Google Scholar
Gruverman, A., Tokumoto, H., Prakash, A. S., et al., “Nanoscale imaging of domain dynamics and retention in ferroelectric thin films,” Appl. Phys. Lett., vol. 71 , p. 3492, 1997CrossRefGoogle Scholar
Artieda, A., Barbieri, M., Sandu, C. S., and Muralt, P., “Effect of substrate roughness on c-oriented AlN thin films,” J. Appl. Phys., vol. 105, p. 024504, 2009.CrossRefGoogle Scholar
Ballantine, D. S., Jr., White, R. M., Martin, S. J., et al., Acoustic Wave Sensors: Theory, Design, & Physico-Chemical Applications. New York: Academic Press Inc., 1997.CrossRefGoogle Scholar

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