Advanced RF MEMS

doi:10.1017/CBO9780511781995

An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. Reviews RF MEMS technologies Illustrates new techniques that solve long-standing problems associated with reliability and packaging Provides the information needed to incorporate RF MEMS into commercial products Describes current and future trends in RF MEMS, providing perspective on industry growth Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

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Contents

Frontmatter
pp i-iv
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Dedication
pp v-vi
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Contents
pp vii-xiii
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List of Contributors
pp xiv-xvi
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Preface
pp xvii-xix
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List of Abbreviations
pp xx-xxviii
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1 - Introduction
pp 1-22
- By Stepan Lucyszyn, Imperial College of Science, Technology and Medicine, London
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2 - Electromechanical modelling of electrostatic actuators
pp 23-40
- By David Elata, Technion – Israel Institute of Technology, Vitaly Leus, Technion – Israel Institute of Technology
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3 - Switches and their fabrication technologies
pp 41-72
- By Thomas Lisec, Fraunhofer - Institut für Siliziumtechnologie (FhG-ISiT)
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4 - Niche switch technologies
pp 73-108
- By Stepan Lucyszyn, Imperial College of Science, Technology and Medicine, London , Suneat Pranonsatit, Kasetsart University, Joo-Young Choi, Sony Stuttgart Technology Centre, Andrew S. Holmes, Imperial College London
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5 - Reliability
pp 109-139
- By Ingrid De Wolf, Interuniversity Microelectronics Center (IMEC)
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6 - Dielectric charging
pp 140-187
- By George Papaioannou, University of Athens
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7 - Stress and thermal characterisation
pp 188-204
- By René-Yves Fillit, Ecole des Mines, Roland Fortunier, Ecole des Mines
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8 - High-power handling
pp 205-231
- By Fabio Coccetti, Centre National de la Recherche Scientifique – Laboratoire d’Analyse et d’Architecture des Systèmes (CNRS-LAAS), Robert Plana, Centre National de la Recherche Scientifique – Laboratoire d’Analyse et d’Architecture des Systèmes (CNRS-LAAS)
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9 - Packaging
pp 232-270
- By Harrie A. C. Tilmans, Interuniversity Microelectronics Center (IMEC), Anne Jourdain, Interuniversity Microelectronics Center (IMEC), Piet De Moor, Interuniversity Microelectronics Center (IMEC)
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10 - Impedance tuners and tuneable filters
pp 271-306
- By Arnaud Pothier, Université de Limoges, Tauno Vähä-Heikkilä, Valtion Teknillinen Tutkimuskeskus (VTT)
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11 - Phase shifters and tuneable delay lines
pp 307-342
- By Laurent Dussopt, Commissariat à l’Énergie Atomique – Laboratoire d’Electronique et de Technologie de l’Information (CEA-LETI)
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12 - Reconfigurable architectures
pp 343-358
- By Tauno Vähä-Heikkilä, Valtion Teknillinen Tutkimuskeskus (VTT)
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13 - Industry roadmap for RF MEMS
pp 359-403
- By Jérémie Bouchaud, Wicht Technologie Consulting (WTC), Roberto Sorrentino, University of Perugia, Bernardo Knoblich, Wicht Technologie Consulting (WTC), Harrie A. C. Tilmans, Interuniversity Microelectronics Center (IMEC), Fabio Coccetti, Centre National de la Recherche Scientifique - Laboratoire d’Analyse et d’Architecture des Systèmes (CNRS-LAAS)
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Author biographies
pp 404-408
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Index
pp 409-412
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Advanced RF MEMS

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Contents

Frontmatter
pp i-iv

Dedication
pp v-vi

Contents
pp vii-xiii

List of Contributors
pp xiv-xvi

Preface
pp xvii-xix

List of Abbreviations
pp xx-xxviii

1 - Introduction
pp 1-22

2 - Electromechanical modelling of electrostatic actuators
pp 23-40

3 - Switches and their fabrication technologies
pp 41-72

4 - Niche switch technologies
pp 73-108

5 - Reliability
pp 109-139

6 - Dielectric charging
pp 140-187

7 - Stress and thermal characterisation
pp 188-204

8 - High-power handling
pp 205-231

9 - Packaging
pp 232-270

10 - Impedance tuners and tuneable filters
pp 271-306

11 - Phase shifters and tuneable delay lines
pp 307-342

12 - Reconfigurable architectures
pp 343-358

13 - Industry roadmap for RF MEMS
pp 359-403

Author biographies
pp 404-408

Index
pp 409-412

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Advanced RF MEMS

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