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Synthesis Analysis of Thin Films by XRD and SEM

Published online by Cambridge University Press:  06 March 2019

Go Fujinawa  and
Shogo Tobe
Go Fujinawa
Affiliation:
Rigaku Corporation, Department of Application Laboratories Matsubara-cho 3-9-12, Akishima-shi, Tokyo 196, Japan
Shogo Tobe
Affiliation:
Department of Precision Engineering, Tokyo Metropolitan University Minami-Ohsawa 1-1, Hachioji-shi, Tokyo 192-03, Japan
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Abstract

This is a report of an investigation by XRD and SEM of thin coatings such as are applied by plasma spray methods for improving properties, such as are wanted in electronic devices, and for increasing durability in service. Samples were studied that had been coated under controlled conditions: Physical Vapor Deposits (PVD) of titanium nitride on steel plate and plasma spray coatings of molybdenum on steel plate. X-Ray determinations were made of x-ray lattice constants, crystallite size, lattice strain, orientation and residual stress, before and after strain was applied to the specimens.

Type
III. Thin-Film and Surface Characterization by XRD
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 197 - 203
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

(1) Endou, T., Takase, K., Yosida, K. and Kawakami, M., Proceedings of the 26th Symposium on X-Ray Studies on Mechanical Behavior of Materials, p.37 (1989).Google Scholar
(2) Tobe, S., Kodama, S., Misawa, H., Akita, K. and Fujinawa, G., Proceedings of ICRS 3rd International Conference on Residual Stress (1991).Google Scholar