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An Automated X-Ray MicroFluorescence Materials Analysis System

Published online by Cambridge University Press:  06 March 2019

David C. Wherry
Affiliation:
Kevex Corp. Foster City, CA
Brian J. Cross
Affiliation:
Kevex Corp. Foster City, CA
Thomas H. Briggs
Affiliation:
AT&T Network Systems Allentown, PA
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Extract

Recently there has been a growing interest in the field of X-Ray MicroFluorescence (XRMF) for analyzing small areas (with sizes greater than about 10 microns diameter). Several recent papers have described prototype systems for this kind of analysis, with particular emphasis on the elemental imaging applications. However, the technique of small-area XRF analysis is not new. For example, Bertin gives an excellent review of much of the earlier work (up to the late 1960s), which used a variety of focusing (with curved crystals) or collimation techniques. Several wavelength dispersive spectrometer systems were modified for small-spot analysis. One of the earliest spectrometers was the X-ray Milliprobe developed by Adler and Axelrod, which employed curved crystals.

Type
I. Microbeam Techniques and Imaging Methods for Materials Characterization
Copyright
Copyright © International Centre for Diffraction Data 1987

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References

1. Nichols, M.C. and Ryon, R.W., “An X-ray Microfluorescenca Analysis System with Diffraction Capabilities”, Adv. X-ray Anal. 29, (1986).Google Scholar
2. Wherry, D.C. and Cross, B.J., “X.F. Microbeam. Analysis aftd Digital Imaging Combined into Powerful New Technique”, Kevex Analyst 12, 8 (1986).Google Scholar
3. Nichols, M.C., Boehme, D.R., Ryon, R. W., Wherry, D.C., Cross, B. J. and Aden, G.D., “Parameters Affecting X-ray Microfluorescence Analysis”, Adv. X-ray Anal. 30 (1987) in press.Google Scholar
4. Boehme, D. R.. “X-ray Microfluorescen.ee Analysis of Thin- and Thick- Sectioned Geologic Materials”, Sandia Report SAND87-8214 (Apr.1987).Google Scholar
5. Bertin, E.P., “Principles and Practices of X-ray Spectrometric Analysis”, 2nd edition, Chap. 19, publ. Plenum Press, NY (1975).Google Scholar
6. Adler, I. and Axelrod, J.M., “The curved-crystal X-ray spectrometer, a mineralogical tool”, Am. Mineralogist, 41, 524 (1956).Google Scholar
7. Maldonado, J.R. and Maydan, D., “Fast Simultaneous Thickness Measurements of Gold and Hickel Layers on Copper Substrates”, The Bell System Technical Journal 58, 1851 (1979).Google Scholar
8. Bush, G.T. and Stebel, M.D., “Measuring Plating Thickness with X-ray Fluorescence”, Plating and Surface Finishing 70, 80 (1983).Google Scholar
9. Linder, R.E., Kladnik, G.A. and Augenstine, J.E., “Simultaneous, Nondestructive Analysis of Thickness and Composition of Multilayer Metal Films using a Fundamental Parameter XRF approach”, SPIE Proceedings 691, 28 (1986).Google Scholar
10. Augenstine, J.E., Linder, R.E. and Reilly, T.C.O., “A Fundamental Parameter Approach for the Analysis of Multilayer Films by X-ray Fluorescence Spectrometry”, paper presented at the 36th Denver X-ray conference, Denver, CO (1987).Google Scholar