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Published online by Cambridge University Press: 06 March 2019
Micro and trace element analysis by X-ray fluorescence was carried out using synchrotron radiation from a bending magnet and an undulator for hard and soft X-ray excitation respectively. The minimum detection limits obtained in the hard X-ray region were less than pg, which corresponds to a spatial resolution of less than a hundred micronmeters, with a detection limit of a few ppm. Light elements such as oxygen, nitrogen and carbon in silicon compounds were analyzed by soft X-ray emission spectroscopy using undulator radiation. The minimum detectable amount of the light elements was greatly improved, since undulator radiation is very strong in intensity, and is highly collimated.