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Auger Electron Emission Micrography and Microanalysis of Solid Surfaces

Published online by Cambridge University Press:  06 March 2019

K. Hayakawa ,
H. Okano ,
S. Kawase  and
S. Yamamoto
K. Hayakawa
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
H. Okano
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
S. Kawase
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
S. Yamamoto
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
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Abstract

An electron probe Auger emission microanalyzer has been constructed. The instrument is composed of an electromagnetic focussing primary probe column and a cylindrical mirror electron energy analyzer. By using this instrument, Auger electron spectroscopy studies have been carried out in the modes of both emission microanalysis and emission micrograph. The feasibility o£ this method is investigated through its application to the study of iron surface.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 17: Twenty-Second Annual Conference on Applications of X-ray Analysis, August 22-24, 1973 , 1973 , pp. 498 - 508
Copyright
Copyright © International Centre for Diffraction Data 1973

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References

1. Harris, L. A., “Analysis of Materials by Electron-Excited Auger Electrons,” J. Appl. Phys. 39, 1419 (1968).Google Scholar
2. Palmberg, P. W., Bohn, G. K. and Tracy, J. C., “High Sensitivity Auger Electron Spectrometer,” Appl. Phys. Lett. 15, 254–255 (1969).Google Scholar
3. Hayakawa, K., Okano, H. Kawase, S and Yamamoto, S., “Auger Electron Emission Micrographic Studies of Cleavage Surface of Graphite Single Crystal,” J. Appl. Phys. 44, 2575–2580 (1973).Google Scholar
4. MacDonald, N. C. and Waldrop, J. R., “Auger Electron Spectroscopy in the Scanning Electron Microscope: Auger Electron Images,” Appl. Phys. Lett. 19, 315–318 (1971).Google Scholar
5. Harris, L. A., “Auger Electron Analysis in a Scanning Microanalyzer,” GE Technical Information Series No. 71-C-273, Sept. 1971.Google Scholar