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Published online by Cambridge University Press: 06 March 2019
Grazing incidence x-ray diffraction (GIXRD) using long soller slit assemblies and a flat crystal monochromator, sometimes referred to as thin film optics, are used to study poly crystal line thin films, polymers, metals, etc. The unique ability of GIXRD to characterize crystalline materials as function of depth and provide accurate strain measurements has lead to the growing popularity of this technique. This non-focusing pseudo-parallel beam geometry can produce various effects on diffraction data which can make interpretation difficult Artifacts such as peak splitting, kα2 distortion, and peaks which shift dramatically as a function of grazing incidence angle are observed when using GIXRD. These artifacts can be related to grazing incidence angle, the divergence of the soller plates, the thickness of the soller plates, the substrate material, and the type of monochromator used. This paper briefly describes some of the topics discussed at the 1992 & 1993 Denver Conferences workshops on parallel beam optics.