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Glancing Angle X-ray Absorption Spectroscopy

Published online by Cambridge University Press:  06 March 2019

G. N. Greaves
G. N. Greaves*
Affiliation:
SERC Daresbury Laboratory, Warrington WA4 4AD, UK and Department of Chemistry, University of Keele, Keele Staffs. ST5 5BG, UK
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Abstract

The use of glancing angles of incidence enables X-ray Absorption Spectroscopy to be measured as a function of depth from the surface of a material into the bulk. As x-rays rather than photoelectrons are detected, a UHV environment is not required and instead surfaces and interfaces can be examined under realistic operational conditions. Whilst the reflected beam carries the fine structure of concentrated species in the imaginary part of the refractive index, this is obscured by the contribution from the real part for angles greater than ϕc, the critical angle for total external reflection. Measuring the x-ray fluorescence offers more flexibility, particularly for dilute systems. The use of synchrotron radiation in conjunction with a multi-element Solid State Detector enables impurity loadings down to a few 1019 cm-3 to be measured which for ion implants is equivalent to around half-monolayer coverage at the surface. This sensitivity makes it practical to examine impurities in semiconductors at realistic dopant levels.

Type
I. Surface and Near-Surface X-Ray Spectroscopy
Information
Advances in X-Ray Analysis , Volume 34: Thirty-Ninth Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1990 , 1990 , pp. 13 - 22
Copyright
Copyright © International Centre for Diffraction Data 1990

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