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Grazing Incidence X-Ray Characterization of Materials

Published online by Cambridge University Press:  06 March 2019

D.K. Bowen
Affiliation:
University of Warwick, Coventry CV4 7AL and Bede Scientific Instruments Ltd., Software Division University of Warwick Science Park, Coventry CV4 7EZ
M. Wormington
Affiliation:
University of Warwick, Coventry CV4 7AL and Bede Scientific Instruments Ltd., Software Division University of Warwick Science Park, Coventry CV4 7EZ
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Abstract

A review of the methods of characterization of materials using X-rays incident at grazing angles is presented. The rationale of all such methods is the need to obtain information from near-surface regions. The methods include grazing incidence diffraction, reflectivity, diffuse scatter and fluorescence. The experimental techniques are outlined, and the information obtainable and the methods of interpretation are discussed.

Type
V. X-Ray Characterization of Thin Films
Copyright
Copyright © International Centre for Diffraction Data 1992

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