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Grazing Incidence X-Ray Scattering Studies of Single Quantum Wells

Published online by Cambridge University Press:  06 March 2019

S. Bates ,
P.D. Hatton ,
C.A. Lucas ,
T.W. Ryan ,
S.J. Miles  and
B.K. Tanner
S. Bates
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
P.D. Hatton
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
C.A. Lucas
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
T.W. Ryan
Affiliation:
Department of Physics, University of Edinburgh Mayfield Rd., Edinburgh, U.K.
S.J. Miles
Affiliation:
Department of Physics, University of Durham South Rd., Durham, U.K.
B.K. Tanner
Affiliation:
Department of Physics, University of Durham South Rd., Durham, U.K.
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Abstract

X-ray scattering techniques at grazing incidence have been used to characterize single quantum well hetero–structures. Double–and triple-axis diffractometry has been used to determine lattice mismatch and layer thickness of a 250Å thick layer of AlInAs grown by MBE on an InP substrate and capped by a 45Å GaAs layer. Reflectivity measurements in the triple – crystal mode permit accurate measurement of individual layer thicknesses, relative electron density and interface roughnesses on the Angstrom level.

Type
II. Characterization of Thin Films by XRD and XRF
Information
Advances in X-Ray Analysis , Volume 31: Thirty-Sixth Annual Conference on Applications of X-ray Analysis, August 3-7, 1987 , 1987 , pp. 155 - 160
Copyright
Copyright © International Centre for Diffraction Data 1987

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References

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