Hostname: page-component-cd9895bd7-p9bg8 Total loading time: 0 Render date: 2024-12-27T15:11:34.639Z Has data issue: false hasContentIssue false
  • English
  • Français

High Speed Characterization of Pseudomorphic Hemt Structures Using a Very Low Noise Scintillation Detector

Published online by Cambridge University Press:  06 March 2019

N. Loxley ,
S. Cockerton  and
B. K. Tanner
N. Loxley
Affiliation:
Bede Scientific Instruments, Lindsey Park, Bowburn, Durham DH6 5PF, U.K.
S. Cockerton
Affiliation:
Bede Scientific Instruments, Lindsey Park, Bowburn, Durham DH6 5PF, U.K.
B. K. Tanner
Affiliation:
Bede Scientific Instruments, Lindsey Park, Bowburn, Durham DH6 5PF, U.K.
Get access

Abstract

We show that a very low noise, high dynamic range scintillation detector has major advantages over conventional detectors for characterization of pseudomorphic HEMT structures by high resolution X-ray diffraction. We show that the reduced background enables a second modulation period to be detected, enabling the thickness and composition to be determined independently. Using a conventional X-ray generator and diffractometer we demonstrate that, in a single scan taking only 10 seconds, we are able to obtain sufficiently good data to provide quality assurance.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 37: Forty-Second Annual Conference on Applications of X-ray Analysis, August 2-6, 1993 , 1993 , pp. 145 - 151
Copyright
Copyright © International Centre for Diffraction Data 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Hudson, J. M, Tanner, B. K. and Blunt, R., Fourier transformation of X-ray rocking curves from interferometer structures, Adv. X-ray Analysis 37 (1994)Google Scholar
2. Kleinknecht, K., Detectors for particle radiation, Cambridge University Press, Cambridge, 1985 Google Scholar
3. Knott, G. F., Radiation detection and measurement, John Wiley, New York, 1979 Google Scholar
4. Loxley, N., Bowen, D K and Tanner, B K, The performance of channel cut collimators for precision X-ray diffraction studies of epitaxial layers, Mater. Res. Soc. Symp. Proc. 208 107 (1991)Google Scholar