Published online by Cambridge University Press: 06 March 2019
Electron induced X-ray mapping together with modern SEM/EDX analysis systems has reached a high level of perfection due to established methods of beam deflection and focusing and today's standard in energy dispersive X-ray detection and data processing. X-ray analysis of specimens based on X-ray excitation (XRF/XRD) is routinely performed on comparatively large specimen areas without conserved spatial information. XRF-/XRD-imaging capabilities are not yet commonly available on standard spectrometers, since both suitable X-ray optical elements are missing and there is a large intensity loss due to the necessary primary beam collimation.