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Published online by Cambridge University Press: 06 March 2019
High precision composition-depth profiles can be determined quickly using a recent development. This method requires that noncompositional broadening arising from the instrument, crystal defects, and the radiation source be removed from the diffraction pattern before calculating the composition-depth profile. Effective deconvolution techniques, profiling theory, methodology of profiling, and the effect of residual noncompositional broadening on the profile are discussed. Examples include statistical analyses of error in the profile due to random counting errors and variance in the lattice parameter calibration.