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Soft and Ultra-Soft X-ray Spectrometry Using Long-Wavelength Dispersive Devices

Published online by Cambridge University Press:  06 March 2019

M. Charbonnier ,
F. Gaillard ,
M. J. Romand  and
D. S. Urch
M. Charbonnier
Affiliation:
Applied Chemistry and Chemical Engineering (CNRS, URA 417), Université Claude Bernard - Lyon 1 F-69622 Villeurbanne cedex, France
F. Gaillard
Affiliation:
Applied Chemistry and Chemical Engineering (CNRS, URA 417), Université Claude Bernard - Lyon 1 F-69622 Villeurbanne cedex, France
M. J. Romand
Affiliation:
Applied Chemistry and Chemical Engineering (CNRS, URA 417), Université Claude Bernard - Lyon 1 F-69622 Villeurbanne cedex, France
D. S. Urch
Affiliation:
Applied Chemistry and Chemical Engineering (CNRS, URA 417), Université Claude Bernard - Lyon 1 F-69622 Villeurbanne cedex, France
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Extract

X-ray emission spectrometry is of great practical interest because the method is rapid, non destructive and quantitative. However, the analysis of light elements which emit highly absorbed long wavelength radiations is always difficult. Although recent development of multilayered microstructures as dispersive devices has brought higher count rates for light elements, the improvement of performance in the relevant energy range depends, largely, on the improvement of the excitation. For this purpose, an electronic source providing a non-focused low energy electron beam constitutes a means of obtaining a very efficient excitation. As a result, we have used such an excitation to compare the performances of some layered synthetic microstructures (LSM) and conventional crystals for the detection of soft and ultra-soft xrays, to show up a few spectral interferences and to solve them by choosing the best dispersive device. Among the cases studied, we have shown how to carry out an accurate analysis of boron in borophosphosilicate glass (BPSG) samples. Finally a survey of the lower detection limits obtained for different elements using different dispersive devices was done.

Type
III. Long-Wavelength X-Ray Spectrometry
Information
Advances in X-Ray Analysis , Volume 34: Thirty-Ninth Annual Conference on Applications of X-ray Analysis, July 30 - August 3, 1990 , 1990 , pp. 139 - 148
Copyright
Copyright © International Centre for Diffraction Data 1990

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References

1. Bador, R., Romand, M., Charbonnier, M. and Roche, A., Adv. in x-ray Anal. 24: 351 (1981).Google Scholar
2. Roche, A.. Charbonnier, H., Saillard, F., Romand, M. and Bador, R., Appl. Surf. Sci. 9:227 (1931).Google Scholar
3. Romand, M., Bador, R., Charbonnier, M. and Gaillard, F., X-ray Spectrometry 16: 7 (1987).Google Scholar
4. Charbonnier, M., Romand, K. and Gaillard, F., Analysis 16(Suppl. 9-10);17 (1988).Google Scholar
5. Romand, M., Gaillard, F., Charbonnier, M. and Urch, D., 39tb Annual Denver X-ray Conference (1990).Google Scholar
6. Charbonnier, M., Romand, H., and Grubis, B., X-ray Spectrometry 17: 149 (1988).Google Scholar
7. Arai, T., Shoji, T., and Ryon, R. W., Adv. in X-ray Anal. 28: 137 (1984).Google Scholar
8. Eenbergen, A. V., and Volbert, B., Adv. in X-ray Anal. 30:201 (1988).Google Scholar
9. Nicolosi, J. A., Groven, J. P., and Merlo, P., Adv. in X-ray Anal. 30: 183 (1986).Google Scholar
10. Arai, T., Adv. in X-ray Anal. 30: 213 (1986).Google Scholar
11. White, R. L., and Huang, T. C., Adv. in X-ray Anal, 32: 331 (1983).Google Scholar
12. Anzelmo, J. A., and Boyer, B. V., Adv. in X-ray Anal. 30: 193 (1986).Google Scholar
13. Huang, T. C., Fung, A., and White, R. L., X-ray Spectrometry 18(2):53 (1989).Google Scholar
14. Price, B. J., Internat. Labmate 13(7):17 (1988).Google Scholar
15. Sella, C., Youn, K., Barchewitz, R., Arbaoui, H., and Krishnan, H., Thin Solid Films 164: 405 (1988).Google Scholar
16. Schuster, M., Müller, L., Mauser, K. E., and Straub, R., Thin Solid Films. 157: 325 (1988).Google Scholar
17. Houdy, P., and Chauvineau, J. P., Le Vide, Les Couches Minces 245: 59 (1989).Google Scholar
18. Madden, H., Cox, J. N., Fruechting, B., and Matteau, J., Solid State Technol. 53 (1989).Google Scholar