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Surface and Ultra-Thin Film Characterization by Grazing-Incidence Asymmetric Bragg Diffraction

Published online by Cambridge University Press:  06 March 2019

T. C. Huang
T. C. Huang*
Affiliation:
IBM Research Division, Almaden Research Center 650 Harry Road, San Jose, CA 95120-6099
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Abstract

An effective technique using grazing-incidence X-rays and asymmetric-Bragg diffraction (GIABD) for the characterization of crystalline phases on surfaces and structural depth-profiles in thin films is described. The application of the GIABD using both X-ray and synchrotron radiation sources for the analysis of an iron-oxide magnetic thin film previously reported to have an unexpected magnetically-dead layer is discussed. The X-ray diffraction analysis using the GIABD and the conventional θ-2θ scanning techniques detected an anti-ferromagnetic hexagonal α-Fe2O3 on the surface and a ferromagnetic tetragonal γ-Fe2O3 in the bulk of the film, respectively. The synchrotron diffraction analysis using incident angles below and above the critical angle of total reflection quantitatively determined the structural depth-profiles of α-Fe2O3 and γ-Fe2O3 in the film.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 91 - 100
Copyright
Copyright © International Centre for Diffraction Data 1989

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