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Advanced characterization of a W-band phase shifter based on liquid crystals and MEMS technology

Published online by Cambridge University Press:  24 April 2012

Carsten Fritzsch ,
Flavio Giacomozzi ,
Onur Hamza Karabey ,
Saygin Bildik ,
Sabrina Colpo  and
Rolf Jakoby
Carsten Fritzsch*
Affiliation:
Institute for Microwave Engineering and Photonics, Technische Universität Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany. Phone: +49 6151 162862
Flavio Giacomozzi
Affiliation:
Fondazione Bruno Kessler FBK, Via Sommarive 18, I-38123 Povo Trento, Italy.
Onur Hamza Karabey
Affiliation:
Institute for Microwave Engineering and Photonics, Technische Universität Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany. Phone: +49 6151 162862
Saygin Bildik
Affiliation:
Institute for Microwave Engineering and Photonics, Technische Universität Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany. Phone: +49 6151 162862
Sabrina Colpo
Affiliation:
Fondazione Bruno Kessler FBK, Via Sommarive 18, I-38123 Povo Trento, Italy.
Rolf Jakoby
Affiliation:
Institute for Microwave Engineering and Photonics, Technische Universität Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany. Phone: +49 6151 162862
*
Corresponding author: Carsten Fritzsch Email: fritzsch@imp.tu-darmstadt.de
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Abstract

In this paper, we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystal as a tunable dielectric layer underneath gold bridges are used to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 92°, a figure of merit (FoM) of 42°/dB and an input matching of −19 dB at 76 GHz.The tuning speed of the phase shifter is measured at different temperatures between 10 and 50°C. The realized phase shifter can be used in combination with MEMS switches in order to build a 360° tunable reflection phase shifter.

Keywords

Passive componentscircuitsRF-MEMSMOEMSLiquid Crystals
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 4 , Special Issue 3: European Microwave Week 2011 , June 2012 , pp. 379 - 386
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2012

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