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Gas flow in micro-channels

Published online by Cambridge University Press:  26 April 2006

John C. Harley ,
Yufeng Huang ,
Haim H. Bau  and
Jay N. Zemel
John C. Harley
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
Yufeng Huang
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
Haim H. Bau
Affiliation:
Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
Jay N. Zemel
Affiliation:
Department of Electrical Engineering, University of Pennsylvania, Philadelphia, PA 19104-6315, USA
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Abstract

An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow.

Type
Research Article
Information
Journal of Fluid Mechanics , Volume 284 , 10 February 1995 , pp. 257 - 274
Copyright
© 1995 Cambridge University Press

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