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A correction to the nanoindentation technique for ultrashallow indenting depths

Published online by Cambridge University Press:  31 January 2011

Chang-Dong Yeo  and
Andreas A. Polycarpou
Chang-Dong Yeo
Affiliation:
Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Andreas A. Polycarpou*
Affiliation:
Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
*
a)Address all correspondence to this author.e-mail: polycarp@uiuc.edu
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Abstract

A correction to the nanoindentation technique taking into account the elastic recovery at extremely shallow contact depths was proposed. Using a high-sensitivity nanoindentation system with a sharp indenting tip, the magnitude of the elastic recovery could be obtained directly from very low-force load–unload curves, which was then used to correct the contact area used for hardness measurements. Nanoindentation experiments were performed on a standard fused quartz sample and, compared to standard nanoindentation techniques, the proposed method was found to be more accurate at ultrashallow indenting depths of <3 nm.

Keywords

Elastic propertiesHardnessNanoscale
Type
Rapid Commnunications
Information
Journal of Materials Research , Volume 22 , Issue 9 , September 2007 , pp. 2359 - 2362
Copyright
Copyright © Materials Research Society 2007

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References

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