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Effect of processing parameters on anodic nanoporous tungsten oxide film structure and porosity for hydrogen detection

Published online by Cambridge University Press:  15 January 2014

Taisheng Yang ,
Yue Zhang ,
Yanan Cai  and
Hui Tian
Taisheng Yang
Affiliation:
Key Laboratory of Aerospace Advanced Materials and Performance (Beihang University), Ministry of Education, School of Materials Science and Engineering, Beihang University, Beijing 100191, People’s Republic of China
Yue Zhang*
Affiliation:
Key Laboratory of Aerospace Advanced Materials and Performance (Beihang University), Ministry of Education, School of Materials Science and Engineering, Beihang University, Beijing 100191, People’s Republic of China
Yanan Cai
Affiliation:
Key Laboratory of Aerospace Advanced Materials and Performance (Beihang University), Ministry of Education, School of Materials Science and Engineering, Beihang University, Beijing 100191, People’s Republic of China
Hui Tian
Affiliation:
College of Material Science and Engineering, Beijing University of Technology, Beijing 100124, People’s Republic of China
*
a)Address all correspondence to this author. e-mail: zhangy@buaa.edu.cn
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Abstract

Nanoporous tungsten oxide films were synthesized by an anodic oxidation process in aqueous NaF/HF electrolytes. The tungsten films were deposited by the radio frequency magnetron sputtering method on sapphire substrates, and the anodic oxidation process was conducted in a dual-electrode reaction chamber with graphite electrode. The effects of processing parameters (anodic voltage, time, temperature, and the operation distance) on the morphology and porosity of the synthesized films were investigated experimentally. The samples were characterized by x-ray diffraction and scanning electron microscopy. The results showed that the pore diameter and porosity increased gradually with increasing anodic voltage, whereas the “wall” of the pore was subjected to electric breakdown at 60 V, and the pore diameter and porosity decreased. The pore diameter and porosity showed an early increased and later decreased state as the operation time and distance are increased. The sensitive response in the resistive method is reaction-dominated type and is exhibited as a linear relationship as a function of hydrogen gas concentration. The response toward 500 ppm hydrogen in air is up to 15.1 with a response time of 10 min at 200 °C.

Keywords

anodic oxidationnanoporous filmporositytungsten oxideH2 sensitivity
Type
Articles
Information
Journal of Materials Research , Volume 29 , Issue 1: Focus Issue: Synthesis of Nanostructured Functional Oxides , 14 January 2014 , pp. 166 - 174
Copyright
Copyright © Materials Research Society 2013 

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References

REFERENCES

Kiwa, T., Tsukada, K., Suzuki, M., Tonouchi, M., Migitaka, S., and Yokosawa, K.: Laser terahertz emission system to investigate hydrogen gas sensors. Appl. Phys. Lett. 86(26), 261102 (2005).Google Scholar
Wang, H-T., Anderson, T.J., Kang, B.S., Ren, F., Li, C., Low, Z-N., Lin, J., Gila, B.P., Pearton, S.J., Osinsky, A., and Dabiran, A.: Stable hydrogen sensors from AlGaN/GaN heterostructure diodes with TiB2-based Ohmic contacts. Appl. Phys. Lett. 90(25), 252109 (2007).Google Scholar
Buttner, W.J., Post, M.B., Burgess, R., and Rivkin, C.: An overview of hydrogen safety sensors and requirements. Int. J. Hydrogen Energy 36(3), 2462 (2011).Google Scholar
Şennik, E., Çolak, Z., Kılınç, N., and Öztürk, Z.Z.: Synthesis of highly-ordered TiO2 nanotubes for a hydrogen sensor. Int. J. Hydrogen Energy 35(9), 4420 (2010).CrossRefGoogle Scholar
Mahan, A.H., Parilla, P.A., Jones, K.M., and Dillon, A.C.: Hot-wire chemical vapor deposition of crystalline tungsten oxide nanoparticles at high density. Chem. Phys. Lett. 413(1–3), 88 (2005).CrossRefGoogle Scholar
Qin, Y., Shen, W., Li, X., and Hu, M.: Effect of annealing on microstructure and NO2-sensing properties of tungsten oxide nanowires synthesized by solvothermal method. Sens. Actuators, B 155(2), 646 (2011).Google Scholar
Su, X.T., Xiao, F., Lin, J.L., Jian, J.K., Li, Y.N., Sun, Q.J., and Wang, J.D.: Hydrothermal synthesis of uniform WO3 submicrospheres using thiourea as an assistant agent. Mater. Charact. 61(8), 831 (2010).CrossRefGoogle Scholar
Van Hieu, N., Van Vuong, H., Van Duy, N., and Hoa, N.D.: A morphological control of tungsten oxide nanowires by thermal evaporation method for sub-ppm NO2 gas sensor application. Sens. Actuators, B 171–172(0), 760 (2012).Google Scholar
Yang, T-S., Lin, Z-R., and Wong, M-S.: Structures and electrochromic properties of tungsten oxide films prepared by magnetron sputtering. Appl. Surf. Sci. 252(5), 2029 (2005).CrossRefGoogle Scholar
Zeng, J., Hu, M., Wang, W., Chen, H., and Qin, Y.: NO2-sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film. Sens. Actuators, B 161(1), 447 (2012).CrossRefGoogle Scholar
Ou, J.Z., Balendhran, S., Field, M.R., McCulloch, D.G., Zoolfakar, A.S., Rani, R.A., Zhuiykov, S., O'Mullane, A.P., and Kalantar-zadeh, K.: The anodized crystalline WO3 nanoporous network with enhanced electrochromic properties. Nanoscale 4(19), 5980 (2012).CrossRefGoogle ScholarPubMed
Ou, J.Z., Rani, R.A., Balendhran, S., Zoolfakar, A.S., Field, M.R., Zhuiykov, S., O'Mullane, A.P., and Kalantar-zadeh, K.: Anodic formation of a thick three-dimensional nanoporous WO3 film and its photocatalytic property. Electrochem. Commun. 27(0), 128 (2013).CrossRefGoogle Scholar
Kim, S. and Choi, J.: Photoelectrochemical anodization for the preparation of a thick tungsten oxide film. Electrochem. Commun. 17(0), 10 (2012).CrossRefGoogle Scholar
Lee, W., Kim, D., Lee, K., Roy, P., and Schmuki, P.: Direct anodic growth of thick WO3 mesosponge layers and characterization of their photoelectrochemical response. Electrochim. Acta 56(2), 828 (2010).CrossRefGoogle Scholar
Kalantar-zadeh, K., Sadek, A.Z., Zheng, H., Bansal, V., Bhargava, S.K., Wlodarski, W., Zhu, J., Yu, L., and Hu, Z.: Nanostructured WO3 films using high temperature anodization. Sens. Actuators, B 142(1), 230 (2009).CrossRefGoogle Scholar
Kukkola, J., Mäklin, J., Halonen, N., Kyllönen, T., Tóth, G., Szabó, M., Shchukarev, A., Mikkola, J-P., Jantunen, H., and Kordás, K.: Gas sensors based on anodic tungsten oxide. Sens. Actuators, B 153(2), 293 (2011).CrossRefGoogle Scholar
Hu, M., Zeng, J., Wang, W., Chen, H., and Qin, Y.: Porous WO3 from anodized sputtered tungsten thin films for NO2 detection. Appl. Surf. Sci. 258(3), 1062 (2011).Google Scholar
Li, F., Zhang, L., and Metzger, R.M.: On the growth of highly ordered pores in anodized aluminum oxide. Chem. Mater. 10(9), 2470 (1998).CrossRefGoogle Scholar
Palibroda, E.: Aluminum porous oxide growth-II. On the rate determining step. Electrochim. Acta 40(8), 1051 (1995).CrossRefGoogle Scholar
Kadary, V. and Klein, N.: Electrical breakdown: I. During the anodic growth of tantalum pentoxide. J. Electrochem. Soc. 127(1), 139 (1980).Google Scholar
Klein, N., Moskovici, V., and Kadary, V.: Electrical breakdown: II. During the anodic growth of aluminum oxide. J. Electrochem. Soc. 127(1), 152 (1980).CrossRefGoogle Scholar
Ng, C., Ye, C., Ng, Y.H., and Amal, R.: Flower-shaped tungsten oxide with inorganic fullerene-like structure: Synthesis and characterization. Cryst. Growth Des. 10(8), 3794 (2010).CrossRefGoogle Scholar
Ghorbani, M., Nasirpouri, F., Irajizad, A., and Saedi, A.: On the growth sequence of highly ordered nanoporous anodic aluminium oxide. Mater. Des. 27(10), 983 (2006).Google Scholar
Våland, T. and Heusler, K.E.: Reactions at the oxide-electrolyte interface of anodic oxide films on aluminum. J. Electroanal. Chem. Interfacial Electrochem. 149(1–2), 71 (1983).Google Scholar
Mason, R.B.: Factors affecting the formation of anodic oxide coatings in sulfuric acid electrolytes. J. Electrochem. Soc. 102(12), 671 (1955).Google Scholar
Applewhite, F.R., Leach, J.S.L., and Neufeld, P.: The temperature rise during anodizing of Al. Corros. Sci. 9(5), 305 (1969).CrossRefGoogle Scholar
Ou, J.Z., Ahmad, M.Z., Latham, K., Kalantar-zadeh, K., Sberveglieri, G., and Wlodarski, W.: Synthesis of the nanostructured WO3 via anodization at elevated temperature for H2 sensing applications. Procedia Eng. 25(0), 247 (2011).Google Scholar
Kellett, E.A. and Rogers, S.E.: The structure of oxide layers on tungsten. J. Electrochem. Soc. 110(6), 502 (1963).CrossRefGoogle Scholar
Barsan, N. and Weimar, U.: Conduction model of metal oxide gas sensors. J. Electroceram. 7(3), 143 (2001).Google Scholar
Yang, L., Zhang, S., Li, H., Zhang, G., Zhan, C., and Xie, C.: Conduction model of coupled domination by bias and neck for porous films as gas sensor. Sens. Actuators, B 176(0), 217 (2013).Google Scholar
Oprea, A., Moretton, E., Barsan, N., Becker, W.J., Wollenstein, J., and Weimar, U.: Conduction model of SnO2 thin films based on conductance and Hall effect measurements. J. Appl. Phys. 100(3), 033716 (2006).Google Scholar
Hübert, T., Boon-Brett, L., Black, G., and Banach, U.: Hydrogen sensors: A review. Sens. Actuators, B 157(2), 329 (2011).Google Scholar
Lenaerts, S., Roggen, J., and Maes, G.: FT-IR characterization of tin dioxide gas sensor materials under working conditions. Spectrochim. Acta, Part A 51(5), 883 (1995).CrossRefGoogle Scholar
Yamazoe, N., Fuchigami, J., Kishikawa, M., and Seiyama, T.: Interactions of tin oxide surface with O2, H2O and H2 . Surf. Sci. 86(0), 335 (1979).Google Scholar
Chang, S-C.: Oxygen chemisorption on tin oxide: Correlation between electrical conductivity and EPR measurements. J. Vac. Sci. Technol., A 17(1), 366 (1980).Google Scholar
Luo, J.Y., Deng, S.Z., Tao, Y.T., Zhao, F.L., Zhu, L.F., Gong, L., Chen, J., and Xu, N.S.: Evidence of localized water molecules and their role in the gasochromic effect of WO3 nanowire films. J. Phys. Chem. C 113(36), 15877 (2009).CrossRefGoogle Scholar
Ou, J.Z., Yaacob, M.H., Breedon, M., Zheng, H.D., Campbell, J.L., Latham, K., Plessis, J.D., Wlodarski, W., and Kalantar-zadeh, K.: In situ Raman spectroscopy of H2 interaction with WO3 films. Phys. Chem. Chem. Phys. 13(16), 7330 (2011).CrossRefGoogle ScholarPubMed
Ou, J.Z., Campbell, J.L., Yao, D., Wlodarski, W., and Kalantar-zadeh, K.: In situ Raman spectroscopy of H2 gas interaction with layered MoO3 . J. Phys. Chem. C 115(21), 10757 (2011).Google Scholar
Laidler, K.J.: Chemical Kinetics (McGraw-Hill Book Company, New York, NY, 1965).Google Scholar